The word 'micromorph' has been lately claimed to belong to an equipment manufacturer of silicon coating tools, but in a patent judgement, this claim has not been accepted by European patent offices.O. Papathanasiou, "A good day for Ms. Schönefeld-Schnuck PI 5/2009 page 44", http://www.op-solar.de/pdfs/A%20good%20day%20for%20Schoenefeld-Schnuck.pdf
