Beryllium oxide is used in many high-performance semiconductor parts for applications such as radio equipment because it has good thermal conductivity while also being a good electrical insulator. It is used as a filler in some thermal interface materials such as thermal grease. Some power semiconductor devices have used beryllium oxide ceramic between the silicon chip and the metal mounting base of the package to achieve a lower value of thermal resistance than a similar construction of aluminium oxide. It is also used as a structural ceramic for high-performance microwave devices, vacuum tubes, magnetrons, and gas lasers. BeO has been proposed as a neutron moderator for naval marine high-temperature gas-cooled reactors (MGCR), as well as NASA's Kilopower nuclear reactor for space applications.
