ogy Status: </td><td>SG13G2 (in development)</td></tr>
<tr><td>Responsible person (Technology): </td><td>H Ruecker</td></tr>
<tr><td>Responsible person(Layout): </td><td>H Ruecker</td></tr>
</tr></table>
<hr>
<h3>Setup of Test Devices</h3>
<table border="1" cellspacing="0" cellpadding="5">
<tr bgcolor=#C0C0C0>
<td width="120" height="40">DUT</td>
<td width="50" align="center">Testfield</td>
<td width="50" align="center">Lot</td>
<td width="50" align="center">Wafer</td>
<td width="50" align="center">Chip</td