align="center" valign="middle" bgcolor="#E0E0E0" nowrap rowspan="2">3</th>
<th width="10%" align="center" valign="middle" bgcolor="#E0E0E0" nowrap rowspan="2">4</th>
<th width="10%" align="center" valign="middle" bgcolor="#E0E0E0" nowrap rowspan="2">5</th>
</tr>
<tr>
<th width="10%" align="center" valign="middle" bgcolor="#E0E0E0" nowrap>ts[ns]</th>
</tr>
<tr>
<th width="10%" align="center" valign="middle" bgcolor="#E0E0E0" nowrap>0.06</th>
<td width="10%" valign="middle" align="center">0.358</td>
<td width