  Structured illumination microscopy (SIM) enables live cell, super-resolution
imaging at high speeds. SIM uses sophisticated optical systems to generate
pre-determined excitation light patterns, and reconstruction algorithms to
enhance the resolution by up to a factor of two. The optical set-up of SIM
relies on delicate free-space optics to generate the light patterns, and a high
numerical aperture objective lens to project the pattern on the sample. These
arrangements are prone to miss-alignment, often with high costs, and with the
final resolution-enhancement being limited by the numerical aperture of the
collection optics. Here, we present a photonic-chip based total internal
reflection fluorescence (TIRF)-SIM that greatly reduces the complexity of the
optical setup needed to acquire TIRF-SIM images. This is achieved by taking out
the light delivery from the microscope and transferring it to a photonic-chip.
The conventional glass slide is replaced by the planar photonic chip, that both
holds and illuminates the specimen. The chip is used to create a standing wave
interference pattern, which illuminates the sample via evanescent fields. The
phase of the interference pattern is controlled by the use of thermo-optical
modulation, leaving the footprint of the light illumination path for the SIM
system to around 4 by 4 cm$^2$. Furthermore, we show that by the use of the
photonic-chip technology, the resolution enhancement of SIM can be increased
above that of the conventional approach. In addition, by the separation of
excitation and collection light paths the technology opens the possibility to
use low numerical objective lenses, without sacrificing on the SIM resolution.
Chip-based SIM represents a simple, stable and affordable approach, which could
enable widespread penetration of the technique and might also open avenues for
high throughput optical super-resolution microscopy.
