  In order to perform quantitative tritium and helium analysis in thin film
sample by using enhanced proton backscattering (EPBS), EPBS spectra for several
samples consisting of non-RBS light elements (i.e., T, 4He, 12C, 16O, natSi),
medium and heavy elements have been measured and analyzed by using analytical
SIMNRA and Monte Carlo-based CORTEO codes. The CORTEO code used in this paper
is modified and some non-RBS cross sections of proton scattering from T, 4He,
12C, 14N, 16O and natSi elements taken from ENDF/B-VII.1 database and the
calculations of SigmaCalc code are incorporated. All cross section data needed
in CORTEO code over the entire proton incident energy-scattering angle plane
are obtained by interpolation. It is quantitatively observed that the multiple
and plural scattering effects have little impact on energy spectra for light
elements like T, He, C, O and Si, and the RBS cross sections of light elements,
instead of the non-RBS cross sections, can be used in SIMNRA code for dual
scattering calculations for EPBS analysis. It is also observed that at the low
energy part of energy spectrum the results given by CORTEO code are higher than
the results of SIMNRA code and are in better agreement with the experimental
data, especially when heavier elements exist in samples. For tritium analysis,
the tritium depth distributions should not be simply adjusted to fit the
experimental spectra when the multiple and plural scattering contributions are
not completely accounted, or else inaccurate results may be obtained. For
medium and heavy matrix elements, when full Monte Carlo RBS calculations are
used in CORTEO code, the results from CORTEO code are in good agreement with
the experimental results at the low energy part of energy spectra, at this
moment quantitative tritium and helium analysis in thin film sample by using
enhanced proton backscattering can be performed reliably.
