  Programmable photonic integrated circuits (PICs) are emerging as powerful
tools for the precise manipulation of light, with applications in quantum
information processing, optical range finding, and artificial intelligence. The
leading architecture for programmable PICs is the mesh of Mach-Zehnder
interferometers (MZIs) embedded with reconfigurable optical phase shifters.
Low-power implementations of these PICs involve micromechanical structures
driven capacitively or piezoelectrically but are limited in modulation
bandwidth by mechanical resonances and high operating voltages. However,
circuits designed to operate exclusively at these mechanical resonances would
reduce the necessary driving voltage from resonantly enhanced modulation as
well as maintaining high actuation speeds. Here we introduce a synchronous,
micromechanically resonant design architecture for programmable PICs, which
exploits micromechanical eigenmodes for modulation enhancement. This approach
combines high-frequency mechanical resonances and optically broadband phase
shifters to increase the modulation response on the order of the mechanical
quality factor $Q_m$, thereby reducing the PIC's power consumption,
voltage-loss product, and footprint. The architecture is useful for broadly
applicable circuits such as optical phased arrays, $1$ x $N$, and $N$ x $N$
photonic switches. We report a proof-of-principle programmable 1 x 8 switch
with piezoelectric phase shifters at specifically targeted mechanical
eigenfrequencies, showing a full switching cycle of all eight channels spaced
by approximately 11 ns and operating at >3x average modulation enhancement
across all on-chip modulators. By further leveraging micromechanical devices
with high $Q_m$, which can exceed 1 million, our design architecture should
enable a new class of low-voltage and high-speed programmable PICs.
