  Dynamic axial focusing functionality has recently experienced widespread
incorporation in microscopy, augmented/virtual reality (AR/VR), adaptive
optics, and material processing. However, the limitations of existing varifocal
tools continue to beset the performance capabilities and operating overhead of
the optical systems that mobilize such functionality. The varifocal tools that
are the least burdensome to drive (ex: liquid crystal, elastomeric or
optofluidic lenses) suffer from low (~ 100 Hz) refresh rates. Conversely, the
fastest devices sacrifice either critical capabilities such as their dwelling
capacity (ex: acoustic gradient lenses or monolithic micromechanical mirrors)
or low operating overhead (e.g., deformable mirrors). Here, we present a
general-purpose random-access axial focusing device that bridges these
previously conflicting features of high speed, dwelling capacity and
lightweight drive by employing low-rigidity micromirrors that exploit the
robustness of defocusing phase profiles. Geometrically, the device consists of
an 8.2 mm diameter array of piston-motion and 48 um-pitch micromirror pixels
that provide 2pi phase shifting for wavelengths shorter than 1 100 nm with
10-90 % settling in 64.8 us (i.e., 15.44 kHz refresh rate). The pixels are
electrically partitioned into 32 rings for a driving scheme that enables
phase-wrapped operation with circular symmetry and requires less than 30 V per
channel. Optical experiments demonstrated the array's wide focusing range with
a measured ability to target 29 distinct, resolvable depth planes. Overall, the
features of the proposed array offer the potential for compact, straightforward
methods of tackling bottlenecked applications including high-throughput
single-cell targeting in neurobiology and the delivery of dense 3D visual
information in AR/VR.
