  Tensile-strained materials have been used to fabricate nano- and
micromechanical resonators with ultra-low mechanical dissipation in the kHz to
MHz frequency range. These mechanical resonators are of particular interest for
force sensing applications and quantum optomechanics at room temperature.
Tensile-strained crystalline materials that are compatible with epitaxial
growth of heterostructures would thereby allow realizing monolithic free-space
optomechanical devices, which benefit from stability, ultra-small mode volumes,
and scalability. In our work, we demonstrate string- and trampoline resonators
made from tensile-strained InGaP, which is a crystalline material that can be
epitaxially grown on an AlGaAs heterostructure. The strain of the InGaP layer
is defined via its Ga content when grown on (Al,Ga)As. In our case, we realize
devices with a stress of up to 470\,MPa along the $[1\,1\,0]$ crystal
direction. We characterize the mechanical properties of the suspended InGaP
devices, such as anisotropic stress, yield strength, and intrinsic quality
factor. We find that the latter degrades over time. We reach mechanical quality
factors surpassing $10^7$ at room temperature with a $Q\cdot f$-product as high
as $7\cdot10^{11}\,$Hz with trampoline-shaped micromechanical resonators, which
exploit strain engineering to dilute mechanical dissipation. The large area of
the suspended trampoline resonator allows us to pattern a photonic crystal to
engineer its out-of-plane reflectivity in the telecom band, which is desired
for efficient signal transduction of mechanical motion to light. Stabilization
of the intrinsic quality factor together with a further reduction of mechanical
dissipation through hierarchical clamping or machine learning-based
optimization methods paves the way for integrated free-space quantum
optomechanics at room temperature in a crystalline material platform.
