  A Global Enhanced Vibrational Kinetic (GEVKM) model is presented for a new
High Current Negative Hydrogen Ion Source (HCNHIS) developed by Busek Co. Inc.
and Worcester Polytechnic Institute. The HCNHIS consists of a high-pressure
radio-frequency discharge (RFD) chamber where high-lying vibrational states of
the hydrogen molecules are produced, a bypass system, a nozzle, and a
low-pressure negative hydrogen ion production region where $\text{H}^-$ are
generated by the dissociative attachment of low energy electrons to
rovibrationally excited hydrogen molecules. The GEVKM is developed from moment
equations for multi-temperature chemically reacting plasmas derived from the
Wang Chang-Uhlenbeck equations for a cylindrical geometry of an inductively
coupled RFD chamber. The species included into the model are $\text{H}(n),
n=0-3, \text{H}_2(v), v=0-14, \text{H}^+, \text{H}_2^+, \text{H}_3^+,
\text{H}^-$, and $e$. The volume-averaged steady-state continuity equations
coupled with the electron energy equation, the total energy equation and heat
transfer to the chamber walls are solved simultaneously to obtain the
volume-averaged number densities of the plasma components, the electron,
heavy-particle and wall temperatures. The GEVKM is supplemented by a
comprehensive set of surface and volumetric chemical processes governing
vibrational and ionization kinetics of hydrogen plasmas. Analytic boundary
conditions developed for the flow in the bypass tubes and in the nozzle take
into account rarefaction effects and are validated by comparing pressures
predictions in the RFD chamber with the pressure measurements. The GEVKM is
verified and validated in the wide range of pressures and absorbed powers of
different plasma reactors and is used in a parametric investigation of the RFD
chamber of the HCNHIS with hydrogen inlet flow rates 5-1000 sccm and absorbed
powers 200-1000 W.
