  Very high frequency (VHF) driven capacitive discharges are now being
increasingly adopted for plasma-based materials processing due to their high
processing rates and lower substrate damage. Past studies related to complex
plasma dynamics and higher harmonics generation in such systems were limited to
constant voltage/current conditions, whereas, industrial systems are mostly
driven by constant power density sources. In the present study, using
particle-in-cell (PIC) simulation, we explore the dynamics of collisionless
symmetric capacitive discharges that is operated at constant power densities.
Our focus is on the effect of the driving frequency on the discharge parameters
like the electron density/temperature, the electron energy distribution
function (EEDF), the ion energy distribution function (IEDF), and the
generation of higher harmonics in the device. The simulations are performed for
a driving frequency from 27.12-100 MHz in argon plasma at a gas pressure of 1
Pa and for two values of the power density, namely, 2 kW/m3 and 20 kW/m3. It is
observed that the required discharge voltage for maintaining constant power
density decreases and discharge current increases with an increase in the
driving frequency. A transition frequency is observed at both power densities.
The density decreases (electron temperature increases) before the transition
frequency and the trend is reversed after crossing the transition frequency.
The EEDF shows an enhancement in the population of the mid-energy range of
electrons as the driving frequency increases up to the transition frequency
thereby changing the shape of EEDF from bi-Maxwellian to nearly Maxwellian, and
then transforms into a nearly bi-Maxwellian at higher driving frequencies.
