  Photonic integrated circuits are indispensible for data transmission within
modern datacenters and pervade into multiple application spheres traditionally
limited for bulk optics, such as LiDAR and biosensing. Of particular interest
are ferroelectrics such as Lithium Niobate, which exhibit a large
electro-optical Pockels effect enabling ultrafast and efficient modulation, but
are difficult to process via dry etching . For this reason, etching tightly
confining waveguides - routinely achieved in silicon or silicon nitride - has
not been possible. Diamond-like carbon (DLC) was discovered in the 1950s and is
a material that exhibits an amorphous phase, excellent hardness, and the
ability to be deposited in nano-metric thin films. It has excellent thermal,
mechanical, and electrical properties, making it an ideal protective coating.
Here we demonstrate that DLC is also a superior material for the manufacturing
of next-generation photonic integrated circuits based on ferroelectrics,
specifically Lithium Niobate on insulator (LNOI). Using DLC as a hard mask, we
demonstrate the fabrication of deeply etched, tightly confining, low loss
photonic integrated circuits with losses as low as 5.6 dB/m. In contrast to
widely employed ridge waveguides, this approach benefits from a more than 1
order of magnitude higher area integration density while maintaining efficient
electro-optical modulation, low loss, and offering a route for efficient
optical fiber interfaces. As a proof of concept, we demonstrate a frequency
agile hybrid integrated III-V Lithium Niobate based laser with kHz linewidth
and tuning rate of 0.7 Peta-Hertz per second with excellent linearity and
CMOS-compatible driving voltage. Our approach can herald a new generation of
tightly confining ferroelectric photonic integrated circuits.
