  The continuous push for high-performance photonic switches is one of the most
crucial premises for the sustainable scaling of programmable and reconfigurable
photonic circuits for a wide spectrum of applications. Large-scale photonic
switches constructed with a large number of 2$\times$2 elementary switches
impose stringent requirements on the elementary switches. In contrast to
conventional elementary switches based on mode interference or mode coupling,
here we propose and realize a brand-new silicon MEMS 2$\times$2 elementary
switch based on a split waveguide crossing (SWX) consisting of two halves. With
this structure, the propagation direction of the incident light can be
manipulated to implement the OFF and ON states by splitting or combining the
two halves of the SWX, respectively. More specifically, we introduce
refractive-index engineering by incorporating subwavelength-tooth (SWT)
structures on both reflecting facets to further reduce the excess loss in the
ON state. Such a unique switching mechanism features a compact footprint on a
standard SOI wafer and enables excellent photonic performance with low excess
loss of 0.1-0.52/0.1-0.47dB and low crosstalk of $\lt$-37/-22.5dB over an
ultrawide bandwidth of 1400-1700nm for the OFF/ON states in simulation, while
in experiment, excess loss of 0.15-0.52/0.42-0.66dB and crosstalk of
$\lt$-45.5/-25dB over the bandwidth of 1525-1605 nm for the OFF/ON states have
been measured.Furthermore, excellent MEMS characteristics such as near-zero
steady-state power consumption, low switching energy of sub-pJ, switching speed
of {\mu}s-scale, durability beyond 10^9 switching cycles, and overall device
robustness have been achieved. Finally, a 16$\times$16 switch using Benes
topology has also been fabricated and characterized as a proof of concept,
further validating the suitability of the SWX switches for large-scale
integration.
