  The global pandemic has significantly increased the demand for personal
protective equipment (PPE). The antimicrobial coating has been broadly applied
to PPE to improve its prevention capability, especially after prolonged usage.
However, antimicrobial coating by traditional methods, such as chemical vapor
deposition, spraying, and slurry coating, suffers from drawbacks such as low
efficiency, poor coverage, and loose adhesion to PPE. To overcome these
limitations, this work adopted an atomic layer deposition (ALD) technique to
deposit a zinc oxide (ZnO) thin film (~ 312.8 nm thick) as an antimicrobial
coating and proved its advantage for depositing uniform ZnO coating on PPE with
a fabric structure. Analysis by X-ray diffraction, Raman spectroscopy, and
X-ray photoelectron spectroscopy confirmed the crystal structure and chemical
composition of the ALD-ZnO. Ultraviolet-visible spectra disclosed a high
absorption level of about 4.8 from 200 nm to 380 nm wavelength for ALD-ZnO, in
contrast to 3.8 for commercial ZnO powders. Moreover, the ALD-ZnO exhibited
strong antimicrobial properties when tested against Escherichia coli (E.Coli)
in contrast to the control and bare glass samples. The colony-forming unit
(CFU/ml) remained zero for all ALD-ZnO samples while varying between 2.30*109
and 4.97*109 with a median of 4.36*109 for the control and between 9.10*108 and
3.27*109 with a median of 2.04x 109 for the bare glass. Statistic analysis
using null-hypothesis significance testing revealed that the calculated P
value, between bare glass and control, ALD-ZnO and control, and bare glass and
control, were all smaller than 0.0001 and significantly smaller than 0.05 alpha
value, suggesting a high confidence level of ALD-ZnO as the main factor for
preventing E.Coli growth.
