  Here, upon systematic studies of femtosecond-laser processing of
monocrystalline Si in oxidation-preventing methanol, we showed that the
electromagnetic processes dominating at initial steps of the progressive
morphology evolution define the onset of the hydrodynamic processes and
resulting morphology upon subsequent multi-pulse exposure. In particular, under
promoted exposure quasi-regular subwavelength laser-induced periodic surface
structures (LIPSSs) were justified to evolve through the template-assisted
development of the Rayleigh-Plateau hydrodynamic instability in the molten
ridges forming quasi-regular surface patterns with a supra-wavelength
periodicity and preferential alignment along polarization direction of the
incident light. Subsequent exposure promotes fusion-assisted morphology
rearrangement resulting in a spiky surface with a random orientation, yet
constant inter-structure distance correlated with initial LIPSS periodicity.
Along with the insight onto the physical picture driving the morphology
evolution and supra-wavelength nanostructure formation, our experiments also
demonstrated that the resulting quasi-regular and random spiky morphology can
be tailored by the intensity/polarization distribution of the incident laser
beam allowing on-demand surface nanotexturing with diverse hierarchical surface
morphologies exhibiting reduced reflectivity in the visible and shortwave IR
spectral ranges. Finally, we highlighted the practical attractiveness of the
suggested approach for improving near-IR photoresponse and expanding operation
spectral range of vertical p-n junction Si photo-detector operating under room
temperature and zero-bias conditions via single-step annealing-free laser
nanopatterning of its surface.
