  Modern science is dependent on imaging on the nanoscale, often achieved
through processes that detect secondary electrons created by a highly focused
incident charged particle beam. Scanning electron microscopy is employed in
applications such as critical-dimension metrology and inspection for
semiconductor devices, materials characterization in geology, and examination
of biological samples. With its applicability to non-conducting materials (not
requiring sample coating before imaging), helium ion microscopy (HIM) is
especially useful in the high-resolution imaging of biological samples such as
animal organs, tumor cells, and viruses. However, multiple types of measurement
noise limit the ultimate trade-off between image quality and the incident
particle dose, which can preclude useful imaging of dose-sensitive samples.
Existing methods to improve image quality do not fundamentally mitigate the
noise sources. Furthermore, barriers to assigning a physically meaningful scale
make these modalities qualitative. Here we introduce ion count-aided microscopy
(ICAM), which is a quantitative imaging technique that uses statistically
principled estimation of the secondary electron yield. With a readily
implemented change in data collection, ICAM nearly eliminates the influence of
source shot noise -- the random variation in the number of incident ions in a
fixed time duration. In HIM, we demonstrate 3x dose reduction; based on a good
match between these empirical results and theoretical performance predictions,
the dose reduction factor is larger when the secondary electron yield is
higher. ICAM thus facilitates imaging of fragile samples and may make imaging
with heavier particles more attractive.
