  Controlling thermal energy transfer at the nanoscale has become critically
important in many applications and thermal properties since it often limits
device performance. In this work, we study the effects on thermal conductivity
arising from the nanoscale structure of free-standing nanocrystalline silicon
films and the increasing surface-to-volume ratio when fabricated into suspended
optomechanical nanobeams. We characterize thermal transport in structures with
different grain sizes and elucidate the relative impact of grain size and
geometrical dimensions on thermal conductivity. We use a micro-time-domain
thermoreflectance method to study the impact of the grain size distribution,
from 10 to 400 nm, on the thermal conductivity in free-standing nanocrystalline
silicon films considering surface phonon and grain boundary scattering. We find
a drastic reduction in the thermal conductivity, down to values of 10
W.m^{-1}.K^{-1} and below, which is just a fraction of the conductivity of
single crystalline silicon. Decreasing the grain size further decreases the
thermal conductivity. We also observe that this effect is smaller in OM
nanostructures than in membranes due to the competition of surface scattering
in decreasing thermal conductivity. Finally, we introduce a novel versatile
contactless characterization technique that can be adapted to any structure
supporting a thermally shifted optical resonance and use it to evaluate the
thermal conductivity. This method can be used with optical resonances
exhibiting different mode profiles and the data is shown to agrees
quantitatively with the thermoreflectance measurements. This work opens the way
to a more generalized thermal characterization of optomechanical cavities and
to create hot-spots with engineered shapes at desired position in the
structures as a means to study thermal transport in coupled photon-phonon
structures.
