  Surface scattering of neutral helium beams created by supersonic expansion is
an established technique for measuring structural and dynamical properties of
surfaces on the atomic scale. Helium beams have also been used in Fraunhofer
and Fresnel diffraction experiments. Due to the short wavelength of the atom
beams of typically 0.1nm or less, Fraunhofer diffraction experiments in
transmission have so far been limited to grating structures with a period
(pitch) of up to 200nm. However, larger periods are of interest for several
applications, for example for the characterization of photonic crystal membrane
structures, where the period is typically in the micron/high sub-micron range.
Here we present helium atom diffraction measurements of a photonic crystal
membrane structure with a two dimensional square lattice of 100x100 circular
holes. The nominal period and hole radius were 490nm and 100nm respectively. To
our knowledge this is the largest period that has ever been measured with
helium diffraction. The helium diffraction measurements are interpreted using a
model based on the helium beam characteristics. It is demonstrated how to
successfully extract values from the experimental data for the average period
of the grating, the hole diameter and the width of the virtual source used to
model the helium beam.
