  Plasma simulations are powerful tools for understanding fundamental plasma
science phenomena and for process optimization in applications. To ensure their
quantitative accuracy, they must be validated against experiments. In this
work, such an experimental validation is performed for a 1d3v particle-in-cell
simulation complemented with the Monte Carlo treatment of collision processes
of a capacitively coupled radio frequency plasma driven at 13.56 MHz and
operated in neon gas. In a geometrically symmetric reactor the electron density
in the discharge center and the spatio-temporal distribution of the electron
impact excitation rate from the ground into the Ne 2p$_1$ state are measured by
a microwave cutoff probe and phase resolved optical emission spectroscopy,
respectively. The measurements are conducted for electrode gaps between 50 mm
and 90 mm, neutral gas pressures between 20 mTorr and 50 mTorr, and
peak-to-peak values of the driving voltage waveform between 250 V and 650 V.
Simulations are performed under identical discharge conditions. In the
simulations, various combinations of surface coefficients characterising the
interactions of electrons and heavy particles with the anodized aluminium
electrode surfaces are adopted. We find, that the simulations using a constant
effective heavy particle induced secondary electron emission coefficient of 0.3
and a realistic electron-surface interaction model (which considers
energy-dependent and material specific elastic and inelastic electron
reflection, as well as the emission of true secondary electrons from the
surface) yield results which are in good quantitative agreement with the
experimental data.
