  The ability to tailor laser light on a chip using integrated photonics has
allowed for extensive control over fundamental light-matter interactions in
manifold quantum systems including atoms, trapped ions, quantum dots, and
defect centers. Free electrons, enabling high-resolution microscopy for
decades, are increasingly becoming the subject of laser-based quantum
manipulation. Using free-space optical excitation and intense laser pulses,
this has led to the observation of free-electron quantum walks, attosecond
electron pulses, and imaging of electromagnetic fields. Enhancing the
interaction with electron beams through chip-based photonics promises unique
applications in nanoscale quantum control and sensing, but has yet to enter
electron microscopy. Here, we merge integrated photonics with electron
microscopy, demonstrating coherent phase modulation of an electron beam using a
silicon nitride microresonator driven by a continuous-wave laser. The high-Q
factor (~$10^6$) cavity enhancement and a waveguide designed for phase matching
lead to efficient electron-light scattering at unprecedentedly low,
few-microwatt optical powers. Specifically, we fully deplete the initial
electron state at a cavity-coupled power of 6 $\mu$W and create >500 photon
sidebands for only 38 mW in the bus waveguide. Moreover, we demonstrate $\mu$eV
electron energy gain spectroscopy (EEGS). Providing simultaneous optical and
electronic spectroscopy of the resonant cavity, the fiber-coupled photonic
structures feature single-mode electron-light interaction with full control
over the input and output channels. This approach establishes a versatile
framework for exploring free-electron quantum optics, with future developments
in strong coupling, local quantum probing, and electron-photon entanglement.
Our results highlight the potential of integrated photonics to efficiently
interface free electrons and light.
