  The unique property of tantalum (Ta), particularly its long coherent lifetime
in superconducting qubits and its exceptional resistance to both acid and
alkali, makes it promising for superconducting quantum processors. It is a
notable advantage to achieve high-performance quantum processors with neat and
unified fabrication of all circuit elements, including coplanar waveguides
(CPW), qubits, and airbridges, on the tantalum film-based platform. Here, we
propose a reliable tantalum airbridges with separate or fully-capped structure
fabricated via a novel lift-off method, where a barrier layer with aluminium
(Al) film is first introduced to separate two layers of photoresist and then
etched away before the deposition of tantalum film, followed by cleaning with
piranha solution to remove the residual photoresist on the chip. We
characterize such tantalum airbridges as the control line jumpers, the ground
plane crossovers and even coupling elements. They exhibit excellent
connectivity, minimal capacitive loss, effectively suppress microwave and flux
crosstalk and offer high freedom of coupling. Besides, by presenting a
surface-13 tunable coupling superconducting quantum processor with median $T_1$
reaching above 100 $\mu$s, the overall adaptability of tantalum airbridges is
verified. The median single-qubit gate fidelity shows a tiny decrease from
about 99.95% for the isolated Randomized Benchmarking to 99.94% for the
simultaneous one. This fabrication method, compatible with all known
superconducting materials, requires mild conditions of film deposition compared
with the commonly used etching and grayscale lithography. Meanwhile, the
experimental achievement of non-local coupling with controlled-Z (CZ) gate
fidelity exceeding 99.2% may further facilitate qLDPC codes, laying a
foundation for scalable quantum computation and quantum error correction with
entirely tantalum elements.
