  An excitation method for MEMS devices with planar electrodes is described.
The stationary part of the device (the stator) consists of three electrode
arrays arranged in the 'ABCABC' order. 'A', 'B', and 'C' carry time-independent
potentials and together form a spatially-periodic electrostatic profile. The
moving part of the device (the translator) has two electrode arrays 'ababab',
with 'a' and 'b' carrying time-dependent out-of-phase voltages. When the
frequency of the time-dependent voltage is close to the natural frequency of
the spring-mass system, the translator is driven into resonance. By adjusting
the spatial phase of the stationary profile, the driving force on the
translator can be maximized for any equilibrium position. Physical misalignment
between the stator and translator resulting from imperfect fabrication can be
corrected electrically. A dynamical equation describing translator motion is
derived and analyzed for resonant and parametric driving. In both cases, the
driving force depends on the translator displacement in a periodic fashion.
Such nonlinearity of the driving force results in self-stabilization of forced
oscillations. This property has implications for the stability of vibratory
gyroscopes.
