  The metal-organic (MO) compound titanium(IV)-isopropoxide (Ti(OiPr)4, TTIP)
has tremendous technological relevance for thin film growth and coating
technologies, offering a low-temperature deposition route for titania and
titanium-oxide-based compounds. Thermal decomposition via the release of
organic ligands, a key process in any TTIP-based synthesis approach, is
commonly assumed to take place only via the beta-hydride elimination process.
Here, we present reactive force field molecular dynamics (ReaxFF-MD) and
metadynamics simulations that challenge this conventionally assumed scenario by
revealing different, energetically preferred reaction pathways. The complete
reaction scheme for the TTIP thermolysis, along with the statistics for the
different ligand liberation steps and the associated reaction barriers for the
bond dissociation events is presented. ReaxFF-MD simulations performed in the
dilute limit realistically capture typical thin film deposition conditions,
which in combination with metadynamics data, which produces free energies,
constitutes a very powerful tool to quantitatively analyze the reaction
dynamics of MO-based thin film growth processes and provide an atomic-scale
understanding of how the remaining organic ligands detach from different
titanium-containing MO fragments. The approach presented here allows for
effective and straightforward identification of the undesirable temperature
biasing effects in ReaxFF-MD and represents a predictive framework to identify
chemical reaction pathways relevant to film growth processes at the atomic
scale under realistic, experimentally relevant conditions. It enables
computationally informed engineering of MO molecules with tailored
decomposition and reaction pathways, and thus rapid and cost-effective
advancements in MO molecule design for existing and future applications of thin
film deposition and coating processes.
