  Scaling or smiliarity laws of plasmas are of interest if lab size plasma
sources are to be scaled for industrial processes. Ideally, the discharge
parameters of the scaled plasmas are predictable and the fundamental physical
processes are unaltered. Naturally, there are limitations and ranges of
validity. Scaling laws for direct current glow discharges are well known. If a
well diagnosed discharge is scaled, the field strength in the positive column,
the gas amplification and the normal current density can easily be estimated.
For non-stationary high power discharges like high power impulse magnetron
sputtering (HiPIMS) plasmas, scaling is not as straight forward. Here, one
deals with a non-stationary complex system with strong changes in plasma
chemistry and symmetry breaks during the pulses. Because of the huge parameter
space no good parameters are available to define these kind of discharges
unambiguous at the moment. In this contribution we will discuss the scaling
laws for DC glow discharges briefly and present experimental results for a
discharge with copper electrodes and helium as plasma forming gas. This
discharge was operated in a pressure range from 200 to 1600 hPa with three
different electrode diameters (D=2.1, 3.0 and 4.3 mm). Results from breakdown
voltage measurements indicate that the pressure and electrode distance cannot
be varied independently. Effects of the scaling on the reduced normal current
density, the reduced normal electric field in the positive column and discharge
temperature will be discussed and limitations highlighted. Compared with these
results the added complexity of HiPIMS plasmas will be described. Suggestions
in the community how to obtain experimental finger prints of the plasmas will
be reviewed and implications from the experiences with DC discharges on the
development of similarity laws for HiPIMS plasmas will be discussed.
