  Strong field-confinement, long-lifetime resonances, and slow-light effects
suggest that meta surfaces are a promising tool for nonlinear optical
applications. These nanostructured devices have been utilized for relatively
high efficiency solid-state high-harmonic generation platforms, four-wave
mixing, and Raman scattering experiments, among others. Here we report the
first all-dielectric metasurface to enhance harmonic generation from a
surrounding gas, achieving as much as a factor of 45 increase in the overall
yield for Argon atoms. When compared to metal nanostructures, dielectrics are
more robust against damage for high power applications such as those using
atomic gases. We employ dimerized high-contrast gratings fabricated in
silicon-on-insulator that support bound states in the continuum, a resonance
feature accessible in broken-symmetry planar devices. Our 1D gratings maintain
large mode volumes, overcoming one of the more severe limitations of earlier
device designs and greatly contributing to enhanced third- and fifth- harmonic
generation. The interaction lengths that can be achieved are also significantly
greater than the 10's of nm to which earlier solid-state designs were
restricted. We perform finite-difference time-domain simulations to fully
characterize the wavelength, linewidth, mode profile, and polarization
dependence of the resonances. Our experiments confirm these predictions and are
consistent with other nonlinear optical properties. The tunable wavelength
dependence and quality-factor control we demonstrate in these devices make them
an attractive tool for the next generation of high-harmonic sources, which are
anticipated to be pumped at longer wavelengths and with lower peak power,
higher repetition rate lasers.
