  The emerging field of deformable microfluidics widely employed in the
Lab-on-a-Chip and MEMS communities offers an opportunity to study a relatively
under-examined physics. The main objective of this work is to provide a deeper
insight into the underlying coupled fluid-solid interactions of a
low-Reynolds-number fluid flow through a shallow deformable microchannel with
ultra-low height-to-width ratios. The fabricated deformable microchannels of
several microns in height and few millimeters in width, whose aspect ratio is
about two orders of magnitude smaller than that of the previous reports, allow
us to investigate the fluid flow characteristics spanning a variety of distinct
regimes from small wall deflections, where the deformable microchannel
resembles its corresponding rigid one, to wall deflections much larger than the
original height, where the height-independent characteristic behavior emerges.
The effects of the microchannel geometry, membrane properties, and pressure
difference across the channel are represented by a lumped variable called
flexibility parameter. Under the same pressure drop across different channels,
any difference in their geometries is reflected into the flexibility parameter
of the channels, which can potentially cause the devices to operate under
distinct regimes of the fluid-solid characteristics. For a fabricated
microchannel with given membrane properties and channel geometry, on the other
hand, a sufficiently large change in the applied pressure difference can alter
the flow-structure behavior from one characteristic regime to another. By
appropriately introducing the flexibility parameter and the dimensionless
volumetric flow rate, a master curve is found for the fluid flow through any
long and shallow deformable microchannel. A criterion is also suggested for
determining whether the coupled or decoupled fluid-solid mechanics should be
considered.
