  Two-dimensional materials (2DM) and their derived heterostructures have
electrical and optical properties that are widely tunable via several
approaches, most notably electrostatic gating and interfacial engineering such
as twisting. While electrostatic gating is simple and has been ubiquitously
employed on 2DM, being able to tailor the interfacial properties in a similar
real-time manner represents the next leap in our ability to modulate the
underlying physics and build exotic devices with 2DM. However, all existing
approaches rely on external machinery such as scanning microscopes, which often
limit their scope of applications, and there is currently no means of tuning a
2D interface that has the same accessibility and scalability as electrostatic
gating. Here, we demonstrate the first on-chip platform designed for 2D
materials with in situ tunable interfacial properties, utilizing a
microelectromechanical system (MEMS). Each compact, cost-effective, and
versatile device is a standalone micromachine that allows voltage-controlled
approaching, twisting, and pressurizing of 2DM with high accuracy. As a
demonstration, we engineer synthetic topological singularities, known as
merons, in the nonlinear optical susceptibility of twisted hexagonal boron
nitride (h-BN), via simultaneous control of twist angle and interlayer
separation. The chirality of the resulting moire pattern further induces a
strong circular dichroism in the second-harmonic generation. A potential
application of this topological nonlinear susceptibility is to create
integrated classical and quantum light sources that have widely and real-time
tunable polarization. Our invention pushes the boundary of available
technologies for manipulating low-dimensional quantum materials, which in turn
opens up the gateway for designing future hybrid 2D-3D devices for
condensed-matter physics, quantum optics, and beyond.
