  The self-excitation of Plasma Series Resonance (PSR) oscillations plays an
important role in the electron heating dynamics in Capacitively Coupled Radio
Frequency (CCRF) plasmas. In a combined approach of PIC/MCC simulations and a
theoretical model based on an equivalent circuit, we investigate the
self-excitation of PSR oscillations and their effect on the electron heating in
geometrically symmetric CCRF plasmas driven by multiple consecutive harmonics.
The discharge symmetry is controlled via the Electrical Asymmetry Effect, i.e.
by varying the total number of harmonics and tuning the phase shifts between
them. It is demonstrated that PSR oscillations will be self-excited under both
symmetric and asymmetric conditions, if (i) the charge-voltage relation of the
plasma sheaths deviates from a simple quadratic behavior and if (ii) the
inductance of the plasma bulk exhibits a temporal modulation. These two effects
have been neglected up to now, but we show that they must be included in the
model in order to properly describe the nonlinear series resonance circuit and
reproduce the self-excitation of PSR oscillations, which are observed in the
electron current density resulting from simulations of geometrically symmetric
CCRF plasmas. Furthermore, the effect of the PSR self-excitation on the
discharge current and the plasma properties, such as the potential profile, is
illustrated by applying Fourier analysis. High frequency oscillations in the
entire spectrum between the applied frequencies and the local electron plasma
frequency are observed. As a consequence, the electron heating is strongly
enhanced by the presence of PSR oscillations.
