Sensor
MOS sensors

Metal–oxide–semiconductor (MOS) technology originates from the MOSFET (MOS field-effect transistor, or MOS transistor) invented by Mohamed M. Atalla and Dawon Kahng in 1959, and demonstrated in 1960. MOSFET sensors (MOS sensors) were later developed, and they have since been widely used to measure physical, chemical, biological and environmental parameters.
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