Ruthenium
Electronics

Electronics is the largest use of ruthenium. Ru metal is particularly nonvolatile, which is advantageous in microelectronic devices. Ru and its main oxide RuO have comparable electrical resistivities. Copper can be directly electroplated onto ruthenium, particular applications include barrier layers, transistor gates, and interconnects. Ru films can be deposited by chemical vapor deposition using volatile complexes such as ruthenium tetroxide and the organoruthenium compound (cyclohexadiene)Ru(CO).
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