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Measuring instruments

Many devices are used to measure the pressure in a vacuum, depending on what range of vacuum is needed.

Hydrostatic gauges (such as the mercury column manometer) consist of a vertical column of liquid in a tube whose ends are exposed to different pressures. The column will rise or fall until its weight is in equilibrium with the pressure differential between the two ends of the tube. The simplest design is a closed-end U-shaped tube, one side of which is connected to the region of interest. Any fluid can be used, but mercury is preferred for its high density and low vapour pressure. Simple hydrostatic gauges can measure pressures ranging from 1 torr (100 Pa) to above atmospheric. An important variation is the McLeod gauge which isolates a known volume of vacuum and compresses it to multiply the height variation of the liquid column. The McLeod gauge can measure vacuums as high as 10 torr (0.1 mPa), which is the lowest direct measurement of pressure that is possible with current technology. Other vacuum gauges can measure lower pressures, but only indirectly by measurement of other pressure-controlled properties. These indirect measurements must be calibrated via a direct measurement, most commonly a McLeod gauge.

The kenotometer is a particular type of hydrostatic gauge, typically used in power plants using steam turbines. The kenotometer measures the vacuum in the steam space of the condenser, that is, the exhaust of the last stage of the turbine.

Mechanical or elastic gauges depend on a Bourdon tube, diaphragm, or capsule, usually made of metal, which will change shape in response to the pressure of the region in question. A variation on this idea is the capacitance manometer, in which the diaphragm makes up a part of a capacitor. A change in pressure leads to the flexure of the diaphragm, which results in a change in capacitance. These gauges are effective from 10 torr to 10 torr, and beyond.

Thermal conductivity gauges rely on the fact that the ability of a gas to conduct heat decreases with pressure. In this type of gauge, a wire filament is heated by running current through it. A thermocouple or Resistance Temperature Detector (RTD) can then be used to measure the temperature of the filament. This temperature is dependent on the rate at which the filament loses heat to the surrounding gas, and therefore on the thermal conductivity. A common variant is the Pirani gauge which uses a single platinum filament as both the heated element and RTD. These gauges are accurate from 10 torr to 10 torr, but they are sensitive to the chemical composition of the gases being measured.

Ionization gauges are used in ultrahigh vacuum. They come in two types: hot cathode and cold cathode. In the hot cathode version an electrically heated filament produces an electron beam. The electrons travel through the gauge and ionize gas molecules around them. The resulting ions are collected at a negative electrode. The current depends on the number of ions, which depends on the pressure in the gauge. Hot cathode gauges are accurate from 10 torr to 10 torr. The principle behind cold cathode version is the same, except that electrons are produced in a discharge created by a high voltage electrical discharge. Cold cathode gauges are accurate from 10 torr to 10 torr. Ionization gauge calibration is very sensitive to construction geometry, chemical composition of gases being measured, corrosion and surface deposits. Their calibration can be invalidated by activation at atmospheric pressure or low vacuum. The composition of gases at high vacuums will usually be unpredictable, so a mass spectrometer must be used in conjunction with the ionization gauge for accurate measurement.