0471930881

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Search Results: displaying 1 - 1 of 1   --> 0471930881 ( ISBN )  

 
 

Focused Ion Beams from Liquid Metal Ion Sources (Electronic and Electrical Engineering Research Studies: Microengineering Series)
Author(s): P. D. Prewett, G. L. R. Mair
ISBN: 0471930881 ISBN-13: 9780471930884

Format: Hardcover   Pages: 332 Edition: 1   
Pub. Date: 1991-10-02 Publisher: Wiley
List Price: $176.00

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Book Description

Focused Ion Beams from Liquid Metal Ion Sources (Electronic and Electrical Engineering Research Studies: Microengineering Series)

Provides an up-to-date review and analysis of liquid metal ion sources and their applications. The contents range from a discussion of the fundamental physics underlying operation of the liquid metal ion sources, through the technical details of their construction and manufacture to their performance characteristics. Their use in focused ion beam systems is covered in detail, including a discussion of the fundamentals of ion optical focusing column design and the various microengineering applications.

 

 
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