Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Structural, chemical and optical characterizations of nanocrystallized
  AlN:Er thin films prepared by r.f. magnetron sputtering   Nanocrystalline n-AlN:Er thin films were deposited on (001) Silicon
substrates by r. f. magnetron sputtering at room temperature to study the
correlation between 1.54 $\mu$m IR photoluminescence (PL) intensity, AlN
crystalline structure and Er concentration rate. This study first presents how
Energy-Dispersive Spectroscopy of X-rays (EDSX) Er Cliff Lorimer sensitivity
factor alpha = 5 is obtained by combining EDSX and electron probe micro
analysis (EPMA) results on reference samples. It secondly presents the relative
PL intensities of nanocrystallized samples prepared with identical sputtering
parameters as a function of the Er concentration. The structure of crystallites
in AlN films is observed by transmission electron microscopy.

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The categories of this paper are: hep-th
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The categories of this paper are: nucl-ex
1
The categories of this paper are: cs
11
The categories of this paper are: hep-lat
26
The categories of this paper are: bayes-an
16
The categories of this paper are: stat
31
The categories of this paper are: ao-sci
8
The categories of this paper are: hep-ex
23
The categories of this paper are: solv-int
19
The categories of this paper are: eess
13
The categories of this paper are: quant-ph
33
The categories of this paper are: plasm-ph
2
The categories of this paper are: math
35
The categories of this paper are: mtrl-th
37
The categories of this paper are: supr-con
20
The categories of this paper are: acc-phys