Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Noncontact dielectric constant metrology of low-k interconnect films
  using a near-field scanned microwave probe   We present a method for noncontact, noninvasive measurements of dielectric
constant, k, of 100-nm- to 1.5-\mu m-thick blanket low-k interconnect films on
up to 300 mm in diameter wafers. The method has about 10 micron sampling spot
size, and provides <0.3% precision and <2% accuracy for k-value. It is based on
a microfabricated near-field scanned microwave probe formed by a 4 GHz parallel
strip transmission line resonator tapered down to a few-micron tip size.

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The categories of this paper are: q-fin
1
The categories of this paper are: cs
28
The categories of this paper are: alg-geom
34
The categories of this paper are: chem-ph
21
The categories of this paper are: adap-org
25
The categories of this paper are: patt-sol
12
The categories of this paper are: nucl-th
29
The categories of this paper are: funct-an
6
The categories of this paper are: astro-ph
7
The categories of this paper are: hep-th
9
The categories of this paper are: nlin
31
The categories of this paper are: ao-sci
16
The categories of this paper are: stat
13
The categories of this paper are: quant-ph
35
The categories of this paper are: mtrl-th
10
The categories of this paper are: q-bio