Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of
  TaSe2   Controlling the strain in two-dimensional materials is an interesting avenue
to tailor the mechanical properties of nanoelectromechanical systems. Here we
demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical
resonators with large stress by laser-oxidation of nano-drumhead resonators
made out of tantalum diselenide (TaSe2), a layered 2D material belonging to the
metal dichalcogenides. Prior to the study of their mechanical properties with a
laser interferometer, we checked the oxidation and crystallinity of the
freely-suspended tantalum oxide in a high-resolution electron microscope. We
show that the stress of tantalum oxide resonators increase by 140 MPa (with
respect to pristine TaSe2 resonators) which causes an enhancement of quality
factor (14 times larger) and resonance frequency (9 times larger) of these
resonators.

22
The categories of this paper are: chao-dyn
16
The categories of this paper are: stat
6
The categories of this paper are: astro-ph
5
The categories of this paper are: gr-qc
7
The categories of this paper are: hep-th
31
The categories of this paper are: ao-sci
12
The categories of this paper are: nucl-th
34
The categories of this paper are: chem-ph
1
The categories of this paper are: cs
27
The categories of this paper are: comp-gas
17
The categories of this paper are: q-fin
11
The categories of this paper are: hep-lat
10
The categories of this paper are: q-bio
25
The categories of this paper are: patt-sol
21
The categories of this paper are: adap-org
9
The categories of this paper are: nlin