Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Demonstration of Sputtering Atomic Layer Augmented Deposition (SALAD):
  Aluminum Oxide-Copper Dielectric-Metal Nanocomposite   Designing a thin film structure often begins with choosing a film deposition
method that employs a specific primary process by which chemical species are
formed and transported. In other words, a film deposition system in which two
complementary deposition methods are hybridized should lead to new ways of
designing thin film structures with structural complexity tailored at a level
that has never been envisioned.This premise inspired us to uniquely combine
atomic layer deposition (ALD) and magnetron sputtering (SPU) within a single
deposition chamber; the combined film deposition system is referred to as
sputtering atomic layer augmented deposition (SALAD). SALAD allows us to take
full advantages of both ALDs precise and accurate precursor delivery and SPUs
versatility in choices of chemical elements. A SALAD system was designed based
on knowledge obtained by computational fluid dynamics with the goal of
conceiving a film deposition system that satisfied deposition conditions
distinctive for both ALD and SPU, and a prototype SALAD system was assembled by
employing off-the-shelf vacuum components.A s a demonstration, the SALAD system
was utilized to deposit a unique nanocomposite made of a stack of aluminum
oxide thin films by ALD and copper thin films by SPU, AlOx-Cu dielectric-metal
(ACDM) nanocomposite thin films, on Si and glass substrates. Spectroscopic
reflectivity collected on ACDM nanocomposite thin films shows unique dispersion
features to which conventional effective medium theories used for describing
optical properties of composites made of a dielectric host that contains
metallic inclusions do not seem to simply apply.

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The categories of this paper are: math
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The categories of this paper are: cmp-lg
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The categories of this paper are: cond-mat
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The categories of this paper are: q-alg
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The categories of this paper are: atom-ph
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The categories of this paper are: mtrl-th
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The categories of this paper are: cs
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The categories of this paper are: eess
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The categories of this paper are: chem-ph
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The categories of this paper are: q-fin
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The categories of this paper are: hep-lat
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The categories of this paper are: gr-qc
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The categories of this paper are: ao-sci
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The categories of this paper are: quant-ph
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The categories of this paper are: hep-ph
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The categories of this paper are: math-ph