Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Morphology change of the silicon surface induced by Ar$^+$ ion beam
  sputtering   Two-level modeling for nanoscale pattern formation on silicon target by
Ar$^+$ ion sputtering is presented. Phase diagram illustrating possible
nanosize surface patterns is discussed. Scaling characteristics for the
structure wavelength dependence versus incoming ion energy are defined. Growth
and roughness exponents in different domains of the phase diagram are obtained.

24
The categories of this paper are: dg-ga
5
The categories of this paper are: gr-qc
10
The categories of this paper are: q-bio
37
The categories of this paper are: supr-con
13
The categories of this paper are: quant-ph
34
The categories of this paper are: chem-ph
11
The categories of this paper are: hep-lat
28
The categories of this paper are: alg-geom
21
The categories of this paper are: adap-org
15
The categories of this paper are: nucl-ex
33
The categories of this paper are: plasm-ph
6
The categories of this paper are: astro-ph
16
The categories of this paper are: stat
18
The categories of this paper are: econ
7
The categories of this paper are: hep-th
3
The categories of this paper are: physics