Instruct: Identify the main and secondary category of Arxiv papers based on the titles
Query: CSAR 62 as negative-tone resist for high-contrast e-beam lithography at
  temperatures between 4 K and room temperature
31
The categories of this paper are: ao-sci
6
The categories of this paper are: astro-ph
33
The categories of this paper are: plasm-ph
12
The categories of this paper are: nucl-th
36
The categories of this paper are: cmp-lg
19
The categories of this paper are: eess
24
The categories of this paper are: dg-ga
2
The categories of this paper are: math
1
The categories of this paper are: cs
34
The categories of this paper are: chem-ph
29
The categories of this paper are: funct-an
11
The categories of this paper are: hep-lat
22
The categories of this paper are: chao-dyn
21
The categories of this paper are: adap-org
7
The categories of this paper are: hep-th
17
The categories of this paper are: q-fin