Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Particle beam experiments for the investigation of plasma-surface
  interactions: application to magnetron sputtering and polymer treatment   A beam experiment is presented to study heterogeneous reactions relevant to
plasma-surface interactions. Atom and ion beams are focused onto the sample to
expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions and
metal vapor. The heterogeneous surface processes are monitored in-situ and in
real time by means of a quartz crystal microbalance (QCM) and Fourier transform
infrared spectroscopy (FTIR). Two examples illustrate the capabilities of the
particle beam setup: oxidation and nitriding of aluminum as a model of target
poisoning during reactive magnetron sputtering, and plasma treatment of
polymers (PET, PP).

5
The categories of this paper are: gr-qc
1
The categories of this paper are: cs
30
The categories of this paper are: q-alg
13
The categories of this paper are: quant-ph
35
The categories of this paper are: mtrl-th
37
The categories of this paper are: supr-con
26
The categories of this paper are: bayes-an
17
The categories of this paper are: q-fin
12
The categories of this paper are: nucl-th
28
The categories of this paper are: alg-geom
6
The categories of this paper are: astro-ph
36
The categories of this paper are: cmp-lg
25
The categories of this paper are: patt-sol
0
The categories of this paper are: hep-ph
19
The categories of this paper are: eess
7
The categories of this paper are: hep-th