Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Very low effective Schottky barrier height for erbium disilicide
  contacts on n-Si through arsenic segregation   The segregation of As+ ions implanted into thin Er films deposited on n-Si
substrates is studied after ErSi2-x formation. The same lowering of the
effective Schottky barrier height (SBH) below 0.12 eV is obtained at moderate
annealing temperatures, regardless of the redistribution of As dopants at the
ErSi2-x/Si interface. On the other hand, if the implanted dose is slightly
enhanced, the annealing temperature required to reach sub-0.12-eV effective SBH
can be further reduced. This process enables the formation of very low
effective SBH ErSi2-x/n-Si contacts with a low thermal budget.

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The categories of this paper are: solv-int
2
The categories of this paper are: math
29
The categories of this paper are: funct-an
24
The categories of this paper are: dg-ga
16
The categories of this paper are: stat
35
The categories of this paper are: mtrl-th
5
The categories of this paper are: gr-qc
30
The categories of this paper are: q-alg
28
The categories of this paper are: alg-geom
32
The categories of this paper are: atom-ph
33
The categories of this paper are: plasm-ph
31
The categories of this paper are: ao-sci
7
The categories of this paper are: hep-th
19
The categories of this paper are: eess
6
The categories of this paper are: astro-ph
20
The categories of this paper are: acc-phys