Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Parasitic Effects Reduction for Wafer-Level Packaging of RF-Mems   In RF-MEMS packaging, next to the protection of movable structures,
optimization of package electrical performance plays a very important role. In
this work, a wafer-level packaging process has been investigated and optimized
in order to minimize electrical parasitic effects. The RF-MEMS package concept
used is based on a wafer-level bonding of a capping silicon substrate to an
RF-MEMS wafer. The capping silicon substrate resistivity, substrate thickness
and the geometry of through-substrate electrical interconnect vias have been
optimized using finite-element electromagnetic simulations (Ansoft HFSS). Test
structures for electrical characterization have been designed and after their
fabrication, measurement results will be compared with simulations.

14
The categories of this paper are: math-ph
33
The categories of this paper are: plasm-ph
21
The categories of this paper are: adap-org
34
The categories of this paper are: chem-ph
6
The categories of this paper are: astro-ph
11
The categories of this paper are: hep-lat
27
The categories of this paper are: comp-gas
4
The categories of this paper are: cond-mat
35
The categories of this paper are: mtrl-th
5
The categories of this paper are: gr-qc
7
The categories of this paper are: hep-th
16
The categories of this paper are: stat
25
The categories of this paper are: patt-sol
8
The categories of this paper are: hep-ex
2
The categories of this paper are: math
30
The categories of this paper are: q-alg