Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Discharge-produced plasma extreme ultraviolet (EUV) source and ultra
  high vacuum chamber for studying EUV-induced processes   An experimental setup that directly reproduces Extreme UV-lithography
relevant conditions for detailed component exposure tests is described. The EUV
setup includes a pulsed plasma radiation source, operating at 13.5 nm; a debris
mitigation system; collection and filtering optics; and an UHV experimental
chamber, equipped with optical and plasma diagnostics. The first results,
identifying the physical parameters and evolution of EUV-induced plasmas are
presented. Finally, the applicability and accuracy of the in situ diagnostics
is briefly discussed.

7
The categories of this paper are: hep-th
28
The categories of this paper are: alg-geom
5
The categories of this paper are: gr-qc
1
The categories of this paper are: cs
29
The categories of this paper are: funct-an
37
The categories of this paper are: supr-con
9
The categories of this paper are: nlin
10
The categories of this paper are: q-bio
26
The categories of this paper are: bayes-an
23
The categories of this paper are: solv-int
2
The categories of this paper are: math
13
The categories of this paper are: quant-ph
20
The categories of this paper are: acc-phys
12
The categories of this paper are: nucl-th
35
The categories of this paper are: mtrl-th
27
The categories of this paper are: comp-gas