Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Impacts of Doping on Epitaxial Germanium Thin Film Quality and Si-Ge
  Interdiffusion   Ge-on-Si structures with three different dopants (P, As and B) and those
without intentional doping were grown and annealed. Several different materials
characterization methods have been performed to characterize the Ge film
quality. All samples have a smooth surface (roughness < 1.5 nm), and the Ge
films are almost entirely relaxed. On the other hand, B doped Ge films have
threading dislocations above 1 x 10^8 cm-2. While P and As doping can reduce
the threading dislocation density to be less than 10^6 cm-2 without annealing.
The interdiffusion of Si and Ge of different films have been investigated
experimentally and theoretically. A quantitative model of Si-Ge interdiffusion
under extrinsic conditions across the full x_Ge range and with the dislocation
mediated diffusion term was established. The Kirkendall effect has been
observed. The results are of technical significance for the structure, doping,
and process design of Ge-on-Si based devices, especially for photonic
applications.

9
The categories of this paper are: nlin
36
The categories of this paper are: cmp-lg
28
The categories of this paper are: alg-geom
29
The categories of this paper are: funct-an
21
The categories of this paper are: adap-org
15
The categories of this paper are: nucl-ex
12
The categories of this paper are: nucl-th
27
The categories of this paper are: comp-gas
37
The categories of this paper are: supr-con
1
The categories of this paper are: cs
16
The categories of this paper are: stat
25
The categories of this paper are: patt-sol
7
The categories of this paper are: hep-th
23
The categories of this paper are: solv-int
20
The categories of this paper are: acc-phys
26
The categories of this paper are: bayes-an