Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Deep level transient spectroscopy study for the development of
  ion-implanted silicon field-effect transistors for spin-dependent transport   A deep level transient spectroscopy (DLTS) study of defects created by
low-fluence, low-energy ion implantation for development of ion-implanted
silicon field-effect transistors for spin-dependent transport experiments is
presented. Standard annealing strategies are considered to activate the
implanted dopants and repair the implantation damage in test
metal-oxide-semiconductor (MOS) capacitors. Fixed oxide charge, interface
trapped charge and the role of minority carriers in DLTS are investigated. A
furnace anneal at 950 $\rm ^{o}$C was found to activate the dopants but did not
repair the implantation damage as efficiently as a 1000 $\rm ^{o}$C rapid
thermal anneal. No evidence of bulk traps was observed after either of these
anneals. The ion- implanted spin-dependent transport device is shown to have
expected characteristics using the processing strategy determined in this
study.

22
The categories of this paper are: chao-dyn
25
The categories of this paper are: patt-sol
2
The categories of this paper are: math
31
The categories of this paper are: ao-sci
6
The categories of this paper are: astro-ph
30
The categories of this paper are: q-alg
32
The categories of this paper are: atom-ph
5
The categories of this paper are: gr-qc
27
The categories of this paper are: comp-gas
24
The categories of this paper are: dg-ga
3
The categories of this paper are: physics
26
The categories of this paper are: bayes-an
1
The categories of this paper are: cs
34
The categories of this paper are: chem-ph
18
The categories of this paper are: econ
16
The categories of this paper are: stat