Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Deposition of MAX phase containing thin films from a (Ti,Zr)2AlC
  compound target   This work reports on sputter depositions carried out from a compound
(Ti,Zr)2AlC target, whereupon Al-containing (Ti,Zr)C thin films (30-40 nm in
thickness) were deposited on MgO(111) and Al2O3(0001) substrates at
temperatures ranging between 500 and 900 {\deg}C. The presence of Al within the
carbide structure was evidenced by lattice parameter variations. Furthermore,
chemical analyses showed that the Al distribution throughout the film thickness
was fairly homogeneous. Thicker films (80-90 nm) deposited from the same
compound target consisted of the pseudo-binary (Ti,Zr)C and intermetallic
compounds in the Ti-Zr-Al system up to 800 {\deg}C, as well as solid solution
MAX phases with different Ti:Zr ratios at 900 {\deg}C. X-ray diffraction and
transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2
solid solution MAX phases were formed. Moreover, this work discusses the growth
mechanism of the thicker films, which started with the formation of the mixed
(Ti,Zr)C carbide, followed by the nucleation and growth of aluminides,
eventually leading to the formation of the MAX phases, which was the primary
objective of the sputter depositions.

24
The categories of this paper are: dg-ga
21
The categories of this paper are: adap-org
11
The categories of this paper are: hep-lat
10
The categories of this paper are: q-bio
19
The categories of this paper are: eess
8
The categories of this paper are: hep-ex
32
The categories of this paper are: atom-ph
12
The categories of this paper are: nucl-th
0
The categories of this paper are: hep-ph
28
The categories of this paper are: alg-geom
25
The categories of this paper are: patt-sol
33
The categories of this paper are: plasm-ph
23
The categories of this paper are: solv-int
15
The categories of this paper are: nucl-ex
18
The categories of this paper are: econ
22
The categories of this paper are: chao-dyn