Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Saturation of front propagation in a reaction-diffusion process
  describing plasma damage in porous low-k materials   We propose a three-component reaction-diffusion system yielding an asymptotic
logarithmic time-dependence for a moving interface. This is naturally related
to a Stefan-problem for which both one-sided Dirichlet-type and von
Neumann-type boundary conditions are considered. We integrate the dependence of
the interface motion on diffusion and reaction parameters and we observe a
change from transport behavior and interface motion \sim t^1/2 to logarithmic
behavior \sim ln t as a function of time. We apply our theoretical findings to
the propagation of carbon depletion in porous dielectrics exposed to a low
temperature plasma. This diffusion saturation is reached after about 1 minute
in typical experimental situations of plasma damage in microelectronic
fabrication. We predict the general dependencies on porosity and reaction
rates.

14
The categories of this paper are: math-ph
29
The categories of this paper are: funct-an
1
The categories of this paper are: cs
15
The categories of this paper are: nucl-ex
5
The categories of this paper are: gr-qc
28
The categories of this paper are: alg-geom
25
The categories of this paper are: patt-sol
7
The categories of this paper are: hep-th
23
The categories of this paper are: solv-int
30
The categories of this paper are: q-alg
9
The categories of this paper are: nlin
19
The categories of this paper are: eess
3
The categories of this paper are: physics
13
The categories of this paper are: quant-ph
8
The categories of this paper are: hep-ex
10
The categories of this paper are: q-bio