Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Carbon Nanotubes in Microelectronic Applications   Carbon nanotubes with their outstanding electrical and mechanical properties
are suggested as interconnect material of the future and as switching devices,
which could outperform silicon devices. In this paper we will introduce
nanotubes, specify the applications, where nanotubes can contribute to the
advancement of Moore's law and show our progress of nanotube process
integration in a microelectronic compatible way. The growth of single
individual nanotubes at lithographically defined locations on whole wafers as a
key requirement for the successful implementation of nanotubes is shown. In
terms of nanotube transistors we propose a vertical nanotube transistor concept
which outperforms the ITRS requirements for the year 2016. The performance is
mainly limited by contact resistances, but by comparison with silicon devices
we show that fabricated nanotube transistors already today exceed the values
for transconductance, on-resistance and drive current of silicon devices.

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The categories of this paper are: atom-ph
21
The categories of this paper are: adap-org
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The categories of this paper are: solv-int
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The categories of this paper are: supr-con
22
The categories of this paper are: chao-dyn
27
The categories of this paper are: comp-gas
20
The categories of this paper are: acc-phys
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The categories of this paper are: q-alg
5
The categories of this paper are: gr-qc
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The categories of this paper are: stat
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The categories of this paper are: eess
12
The categories of this paper are: nucl-th
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The categories of this paper are: funct-an
2
The categories of this paper are: math
34
The categories of this paper are: chem-ph
9
The categories of this paper are: nlin