Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: A Rigorous Finite-Element Domain Decomposition Method for
  Electromagnetic Near Field Simulations   Rigorous computer simulations of propagating electromagnetic fields have
become an important tool for optical metrology and design of nanostructured
optical components. A vectorial finite element method (FEM) is a good choice
for an accurate modeling of complicated geometrical features. However, from a
numerical point of view solving the arising system of linear equations is very
demanding even for medium sized 3D domains. In numerics, a domain decomposition
method is a commonly used strategy to overcome this problem. Within this
approach the overall computational domain is split up into smaller domains and
interface conditions are used to assure continuity of the electromagnetic
field. Unfortunately, standard implementations of the domain decomposition
method as developed for electrostatic problems are not appropriate for wave
propagation problems. In an earlier paper we therefore proposed a domain
decomposition method adapted to electromagnetic field wave propagation
problems. In this paper we apply this method to 3D mask simulation.

19
The categories of this paper are: eess
0
The categories of this paper are: hep-ph
22
The categories of this paper are: chao-dyn
36
The categories of this paper are: cmp-lg
11
The categories of this paper are: hep-lat
13
The categories of this paper are: quant-ph
15
The categories of this paper are: nucl-ex
14
The categories of this paper are: math-ph
6
The categories of this paper are: astro-ph
31
The categories of this paper are: ao-sci
1
The categories of this paper are: cs
34
The categories of this paper are: chem-ph
8
The categories of this paper are: hep-ex
37
The categories of this paper are: supr-con
29
The categories of this paper are: funct-an
30
The categories of this paper are: q-alg