Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for
  electret-based vibration energy harvesters   This paper is about a new manufacturing process aimed at developing stable
SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step
for an application in electret Vibration Energy Harvesters (VEH). Electrets
charged by a positive corona discharge show excellent stability with high
surface charge density that can reach 5mC/m^{2} on 1.1\mum-thick layers, even
with fine patterning (down to 25\mum) and harsh temperature conditions (up to
250{\deg}C), paving the way to new electret VEH designs and manufacturing
processes.

27
The categories of this paper are: comp-gas
1
The categories of this paper are: cs
22
The categories of this paper are: chao-dyn
11
The categories of this paper are: hep-lat
19
The categories of this paper are: eess
18
The categories of this paper are: econ
12
The categories of this paper are: nucl-th
15
The categories of this paper are: nucl-ex
13
The categories of this paper are: quant-ph
3
The categories of this paper are: physics
29
The categories of this paper are: funct-an
32
The categories of this paper are: atom-ph
23
The categories of this paper are: solv-int
8
The categories of this paper are: hep-ex
20
The categories of this paper are: acc-phys
24
The categories of this paper are: dg-ga