Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Development and Performance of the Nanoworkbench: A Four Tip STM for
  Electrical Conductivity Measurements Down to Sub-micrometer Scales   A multiple-tip ultra-high vacuum (UHV) scanning tunneling microscope (MT-STM)
with a scanning electron microscope (SEM) for imaging and molecular-beam
epitaxy growth capabilities has been developed. This instrument (nanoworkbench)
is used to perform four-point probe conductivity measurements at micrometer
spatial dimension. The system is composed of four chambers, the multiple-tip
STM/SEM chamber, a surface analysis and preparation chamber, a molecular-beam
epitaxy chamber and a load-lock chamber for fast transfer of samples and
probes. The four chambers are interconnected by a unique transfer system based
on a sample box with integrated heating and temperature-measuring capabilities.
We demonstrate the operation and the performance of the nanoworkbench with STM
imaging on graphite and with four-point-probe conductivity measurements on a
silicon-on-insulator (SOI) crystal. The creation of a local FET, whose
dimension and localization are respectively determined by the spacing between
the probes and their position on the SOI surface, is demonstrated.

32
The categories of this paper are: atom-ph
26
The categories of this paper are: bayes-an
1
The categories of this paper are: cs
30
The categories of this paper are: q-alg
14
The categories of this paper are: math-ph
10
The categories of this paper are: q-bio
36
The categories of this paper are: cmp-lg
27
The categories of this paper are: comp-gas
7
The categories of this paper are: hep-th
19
The categories of this paper are: eess
8
The categories of this paper are: hep-ex
31
The categories of this paper are: ao-sci
28
The categories of this paper are: alg-geom
20
The categories of this paper are: acc-phys
6
The categories of this paper are: astro-ph
9
The categories of this paper are: nlin