Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Direct atomic fabrication and dopant positioning in Si using electron
  beams with active real time image-based feedback   Semiconductor fabrication is a mainstay of modern civilization, enabling the
myriad applications and technologies that underpin everyday life. However,
while sub-10 nanometer devices are already entering the mainstream, the end of
the Moore's Law roadmap still lacks tools capable of bulk semiconductor
fabrication on sub-nanometer and atomic levels, with probe-based manipulation
being explored as the only known pathway. Here we demonstrate that the
atomic-sized focused beam of a scanning transmission electron microscope can be
used to manipulate semiconductors such as Si on the atomic level, inducing
growth of crystalline Si from the amorphous phase, reentrant amorphization,
milling, and dopant-front motion. These phenomena are visualized in real time
with atomic resolution. We further implement active feedback control based on
real-time image analytics to control the e-beam motion, enabling shape control
and providing a pathway for atom-by-atom correction of fabricated structures in
the near future. These observations open a new epoch for atom-by-atom
manufacturing in bulk, the long-held dream of nanotechnology.

18
The categories of this paper are: econ
5
The categories of this paper are: gr-qc
26
The categories of this paper are: bayes-an
12
The categories of this paper are: nucl-th
28
The categories of this paper are: alg-geom
36
The categories of this paper are: cmp-lg
7
The categories of this paper are: hep-th
21
The categories of this paper are: adap-org
24
The categories of this paper are: dg-ga
16
The categories of this paper are: stat
0
The categories of this paper are: hep-ph
8
The categories of this paper are: hep-ex
29
The categories of this paper are: funct-an
35
The categories of this paper are: mtrl-th
10
The categories of this paper are: q-bio
34
The categories of this paper are: chem-ph