Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Silicon Detector Arrays with Absolute Quantum Efficiency over 50% in the
  Far Ultraviolet for Single Photon Counting Applications   We have used Molecular Beam Epitaxy (MBE)-based delta doping technology to
demonstrate near 100% internal quantum efficiency (QE) on silicon
electron-multiplied Charge Coupled Devices (EMCCDs) for single photon counting
detection applications. Furthermore, we have used precision techniques for
depositing antireflection (AR) coatings by employing Atomic Layer Deposition
(ALD) and demonstrated over 50% external QE in the far and near-ultraviolet in
megapixel arrays. We have demonstrated that other device parameters such as
dark current are unchanged after these processes. In this paper, we report on
these results and briefly discuss the techniques and processes employed.

20
The categories of this paper are: acc-phys
13
The categories of this paper are: quant-ph
8
The categories of this paper are: hep-ex
4
The categories of this paper are: cond-mat
11
The categories of this paper are: hep-lat
37
The categories of this paper are: supr-con
12
The categories of this paper are: nucl-th
32
The categories of this paper are: atom-ph
7
The categories of this paper are: hep-th
2
The categories of this paper are: math
35
The categories of this paper are: mtrl-th
36
The categories of this paper are: cmp-lg
16
The categories of this paper are: stat
25
The categories of this paper are: patt-sol
31
The categories of this paper are: ao-sci
26
The categories of this paper are: bayes-an