Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: DSA-aware multiple patterning for the manufacturing of vias: Connections
  to graph coloring problems, IP formulations, and numerical experiments   In this paper, we investigate the manufacturing of vias in integrated
circuits with a new technology combining lithography and Directed Self Assembly
(DSA). Optimizing the production time and costs in this new process entails
minimizing the number of lithography steps, which constitutes a generalization
of graph coloring. We develop integer programming formulations for several
variants of interest in the industry, and then study the computational
performance of our formulations on true industrial instances. We show that the
best integer programming formulation achieves good computational performance,
and indicate potential directions to further speed-up computational time and
develop exact approaches feasible for production.

14
The categories of this paper are: math-ph
20
The categories of this paper are: acc-phys
37
The categories of this paper are: supr-con
35
The categories of this paper are: mtrl-th
10
The categories of this paper are: q-bio
16
The categories of this paper are: stat
36
The categories of this paper are: cmp-lg
34
The categories of this paper are: chem-ph
0
The categories of this paper are: hep-ph
18
The categories of this paper are: econ
32
The categories of this paper are: atom-ph
7
The categories of this paper are: hep-th
17
The categories of this paper are: q-fin
11
The categories of this paper are: hep-lat
33
The categories of this paper are: plasm-ph
8
The categories of this paper are: hep-ex