Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: A new investigation of oxygen flow influence on ITO thin films by
  magnetron sputtering   ITO thin films were deposited on glass substrates by d.c. magnetron
sputtering with varied oxygen flow rates. It was found that the optical
absorption decreases and optical absorption edge has blue shifts with the
increasing oxygen flow rate. Oxygen vacancy concentration was characterized and
analyzed by XPS. It is shown that the oxygen vacancy concentration increases
with oxygen flow rates, which is a different observation from the current
understanding. The energy band structures associated with different vacancy
concentrations of ITO were calculated using the first-principle based on
density functional theory. The calculation results show that the increase of
oxygen vacancies induces the increase of bands below Fermi level as well as the
presence of a second band gap, which accounts for effects of the oxygen
vacancies on the blue shifts.

3
The categories of this paper are: physics
33
The categories of this paper are: plasm-ph
8
The categories of this paper are: hep-ex
11
The categories of this paper are: hep-lat
37
The categories of this paper are: supr-con
13
The categories of this paper are: quant-ph
31
The categories of this paper are: ao-sci
2
The categories of this paper are: math
16
The categories of this paper are: stat
19
The categories of this paper are: eess
28
The categories of this paper are: alg-geom
24
The categories of this paper are: dg-ga
21
The categories of this paper are: adap-org
30
The categories of this paper are: q-alg
26
The categories of this paper are: bayes-an
29
The categories of this paper are: funct-an