Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Offcut-related step-flow and growth rate enhancement during (100)
  $\beta$-Ga2O3 homoepitaxy by metal-exchange catalyzed molecular beam epitaxy
  (MEXCAT-MBE)   In this work we investigate the growth of $\beta$-Ga2O3 homoepitaxial layers
on top of (100) oriented substrates via indium-assisted metal exchange
catalyzed molecular beam epitaxy (MEXCAT-MBE) which have exhibited
prohibitively low growth rates by non-catalyzed MBE in the past. We demonstrate
that the proper tuning of the MEXCAT growth parameters and the choice of a
proper substrate offcut allow for the deposition of thin films with high
structural quality via step-flow growth mechanism at relatively high growth
rates for $\beta$-Ga2O3 homoepitaxy (i.e., around 1.5 nm/min, $\approx$45%
incorporation of the incoming Ga flux), making MBE growth on this orientation
feasible. Moreover, through the employment of the investigated four different
(100) substrate offcuts along the [00-1] direction (i.e., 0$^\circ$, 2$^\circ$,
4$^\circ$, 6$^\circ$) we give experimental evidence on the fundamental role of
the (-201) step edges as nucleation sites for growth of (100)-oriented Ga2O3
films by MBE.

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The categories of this paper are: bayes-an
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The categories of this paper are: hep-ph
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The categories of this paper are: quant-ph
5
The categories of this paper are: gr-qc
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The categories of this paper are: econ
1
The categories of this paper are: cs
16
The categories of this paper are: stat
32
The categories of this paper are: atom-ph
8
The categories of this paper are: hep-ex
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The categories of this paper are: comp-gas
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The categories of this paper are: plasm-ph
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The categories of this paper are: dg-ga
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The categories of this paper are: funct-an
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The categories of this paper are: q-bio
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The categories of this paper are: hep-lat
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The categories of this paper are: nucl-ex