Instruct: Identify the main and secondary category of Arxiv papers based on the titles
Query: Deep Learning Regression of VLSI Plasma Etch Metrology
31
The categories of this paper are: ao-sci
5
The categories of this paper are: gr-qc
24
The categories of this paper are: dg-ga
35
The categories of this paper are: mtrl-th
28
The categories of this paper are: alg-geom
17
The categories of this paper are: q-fin
12
The categories of this paper are: nucl-th
36
The categories of this paper are: cmp-lg
11
The categories of this paper are: hep-lat
34
The categories of this paper are: chem-ph
9
The categories of this paper are: nlin
14
The categories of this paper are: math-ph
10
The categories of this paper are: q-bio
20
The categories of this paper are: acc-phys
6
The categories of this paper are: astro-ph
37
The categories of this paper are: supr-con