Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Synthesis of nanocrystalline d-MoN by thermal annealing of amorphous
  thin films grown on (100) Si by reactive DC sputtering at room temperature   We report on the synthesis and characterization of nanocrystalline delta-MoN
by crystallization of amorphous thin films grown on (100) Si by reactive
sputtering at room temperature. Films with chemical composition MoN were grown
using a deposition pressure of 5mTorr with a reactive mixture of
Ar/(Ar+N2)=0.5. The as-grown films display mostly amorphous structure.
Nanocrystalline delta-MoN phase is obtained after annealing at temperatures
above 600 {\deg}C. The superconducting critical temperature Tc depends on film
thickness. Thick films (170 nm) annealed at 700 {\deg}C for 30 min display a Tc
= 11.2 K (close to the one reported for bulk specimens: 13 K), which is
gradually suppressed to 7.2 K for 40 nm thick delta-MoN films. Our results
provide a simple method to synthesize superconducting nitride thin films on
silicon wafers with Tc above the ones observed for conventional superconductors
such as Nb.

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The categories of this paper are: q-fin
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The categories of this paper are: eess
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The categories of this paper are: acc-phys
0
The categories of this paper are: hep-ph
2
The categories of this paper are: math
10
The categories of this paper are: q-bio
6
The categories of this paper are: astro-ph
9
The categories of this paper are: nlin
34
The categories of this paper are: chem-ph
8
The categories of this paper are: hep-ex
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The categories of this paper are: dg-ga
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The categories of this paper are: alg-geom
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The categories of this paper are: atom-ph
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The categories of this paper are: funct-an
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The categories of this paper are: physics
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The categories of this paper are: hep-lat