Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: On-chip self-sensing enhancing actuation for MEMS/NEMS with large
  efficiency   The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators
is difficult due to a number of difficulties such as material choice, large
dissipation, restriction in high frequency, low sensitivity, poor reliability,
and poor integrability. We show a universal on-chip transduction scheme, which
can be adapted to any MEMS/NEMS resonator. We achieve all electrical, on-chip
MEMS/NEMS for any resonator.

32
The categories of this paper are: atom-ph
16
The categories of this paper are: stat
28
The categories of this paper are: alg-geom
14
The categories of this paper are: math-ph
30
The categories of this paper are: q-alg
33
The categories of this paper are: plasm-ph
17
The categories of this paper are: q-fin
18
The categories of this paper are: econ
23
The categories of this paper are: solv-int
4
The categories of this paper are: cond-mat
11
The categories of this paper are: hep-lat
22
The categories of this paper are: chao-dyn
13
The categories of this paper are: quant-ph
27
The categories of this paper are: comp-gas
20
The categories of this paper are: acc-phys
8
The categories of this paper are: hep-ex