Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: A Review of Proximity Effect Correction in Electron-beam Lithography   I review the work of proximity effect correction (PEC) in electron-beam
(e-beam) lithography with emphasis on dose modification and shape modification
PEC techniques.

1
The categories of this paper are: cs
17
The categories of this paper are: q-fin
2
The categories of this paper are: math
21
The categories of this paper are: adap-org
11
The categories of this paper are: hep-lat
36
The categories of this paper are: cmp-lg
3
The categories of this paper are: physics
32
The categories of this paper are: atom-ph
22
The categories of this paper are: chao-dyn
25
The categories of this paper are: patt-sol
8
The categories of this paper are: hep-ex
31
The categories of this paper are: ao-sci
33
The categories of this paper are: plasm-ph
0
The categories of this paper are: hep-ph
9
The categories of this paper are: nlin
19
The categories of this paper are: eess