Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Analysis of a Sputtered Si Surface for Ar Sputter Gas Supply Purity
  Monitoring   For sputter depth profiling often sample erosion by Ar+ ions is used. Only a
high purity of the sputter gas and a low contamination level of the ion gun
avoids misleading depth profile measurements results. Here a new measurement
procedure is presented, which monitors these parameters. A Si sample is
sputtered inside the instrument and then the surface concentration of the
elements Ar, C, N and O is measured. Results of such measurements of an XPS
microprobe PHI Quantum 2000, which were recorded over a period of 10 years, are
presented.

7
The categories of this paper are: hep-th
35
The categories of this paper are: mtrl-th
23
The categories of this paper are: solv-int
9
The categories of this paper are: nlin
13
The categories of this paper are: quant-ph
17
The categories of this paper are: q-fin
4
The categories of this paper are: cond-mat
18
The categories of this paper are: econ
37
The categories of this paper are: supr-con
16
The categories of this paper are: stat
31
The categories of this paper are: ao-sci
20
The categories of this paper are: acc-phys
11
The categories of this paper are: hep-lat
19
The categories of this paper are: eess
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The categories of this paper are: alg-geom
10
The categories of this paper are: q-bio