Instruct: Identify the main and secondary category of Arxiv papers based on the titles
Query: Dopant metrology in advanced FinFETs
6
The categories of this paper are: astro-ph
33
The categories of this paper are: plasm-ph
13
The categories of this paper are: quant-ph
24
The categories of this paper are: dg-ga
14
The categories of this paper are: math-ph
26
The categories of this paper are: bayes-an
15
The categories of this paper are: nucl-ex
27
The categories of this paper are: comp-gas
3
The categories of this paper are: physics
11
The categories of this paper are: hep-lat
32
The categories of this paper are: atom-ph
29
The categories of this paper are: funct-an
28
The categories of this paper are: alg-geom
5
The categories of this paper are: gr-qc
2
The categories of this paper are: math
25
The categories of this paper are: patt-sol