Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Design and Fabrication of Micromachined Resonators   Microelectromechanical system (MEMS) based on-chip resonators offer great
potential for sensing and high frequency signal processing applications due to
their exceptional features like small size, large frequency-quality factor
product, integrability with CMOS ICs, low power consumption etc. This work is
mainly aimed at the design, modeling, simulation, and fabrication of
micromachined polysilicon disk resonators exhibiting radial-contour mode
vibrations. A few other bulk mode modified resonator geometries are also being
explored. The resonator structures have been designed and simulated in
CoventorWare finite-element platform and fabricated by the PolyMUMPs surface
micromachining process.

2
The categories of this paper are: math
15
The categories of this paper are: nucl-ex
11
The categories of this paper are: hep-lat
17
The categories of this paper are: q-fin
4
The categories of this paper are: cond-mat
30
The categories of this paper are: q-alg
8
The categories of this paper are: hep-ex
22
The categories of this paper are: chao-dyn
26
The categories of this paper are: bayes-an
20
The categories of this paper are: acc-phys
23
The categories of this paper are: solv-int
7
The categories of this paper are: hep-th
24
The categories of this paper are: dg-ga
29
The categories of this paper are: funct-an
3
The categories of this paper are: physics
27
The categories of this paper are: comp-gas