Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Finite Element Simulation of Light Propagation in Non-Periodic Mask
  Patterns   Rigorous electromagnetic field simulations are an essential part for
scatterometry and mask pattern design. Today mainly periodic structures are
considered in simulations. Non-periodic structures are typically modeled by
large, artificially periodified computational domains. For systems with a large
radius of influence this leads to very large computational domains to keep the
error sufficiently small. In this paper we review recent advances in the
rigorous simulation of isolated structures embedded into a surrounding media.
We especially address the situation of a layered surrounding media (mask or
wafer) with additional infinite inhomogeneities such as resist lines. Further
we detail how to extract the far field information needed for the aerial image
computation in the non-periodic setting.

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The categories of this paper are: hep-ph
13
The categories of this paper are: quant-ph
21
The categories of this paper are: adap-org
15
The categories of this paper are: nucl-ex
32
The categories of this paper are: atom-ph
16
The categories of this paper are: stat
8
The categories of this paper are: hep-ex
2
The categories of this paper are: math
27
The categories of this paper are: comp-gas
29
The categories of this paper are: funct-an
36
The categories of this paper are: cmp-lg
20
The categories of this paper are: acc-phys
12
The categories of this paper are: nucl-th
24
The categories of this paper are: dg-ga
5
The categories of this paper are: gr-qc
34
The categories of this paper are: chem-ph