Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Microfabrication of large area high-stress silicon nitride membranes for
  optomechanical devices   In view of the integration of membrane resonators with more complex MEMS
structures, we developed a general fabrication procedure for circular shape
SiN$_x$ membranes using Deep Reactive Ion Etching (DRIE). Large area and
high-stress SiN$_x$ membranes were fabricated and used as optomechanical
resonators in a Michelson interferometer and in a Fabry-P\'erot cavity. The
measurements show that the fabrication process preserves both the optical
quality and the mechanical quality factor of the membrane.

12
The categories of this paper are: nucl-th
18
The categories of this paper are: econ
37
The categories of this paper are: supr-con
28
The categories of this paper are: alg-geom
34
The categories of this paper are: chem-ph
11
The categories of this paper are: hep-lat
0
The categories of this paper are: hep-ph
31
The categories of this paper are: ao-sci
7
The categories of this paper are: hep-th
26
The categories of this paper are: bayes-an
27
The categories of this paper are: comp-gas
36
The categories of this paper are: cmp-lg
22
The categories of this paper are: chao-dyn
6
The categories of this paper are: astro-ph
16
The categories of this paper are: stat
10
The categories of this paper are: q-bio