Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Phase Analysis of Thin Film Oxide Systems by AES and EELS   Auger electron spectroscopy (AES) and electron energy loss spectroscopy
(EELS) in a reflection mode are compared as the methods for phase composition
investigation of thin film oxide systems by ion profiling. As an example, the
Al/Al2O3/Si and YBa2Cu3O7/CeO2/Al2O3 systems are considered. The adaptation of
applied statistics methods for AES and EELS data treatment is discussed.

20
The categories of this paper are: acc-phys
5
The categories of this paper are: gr-qc
15
The categories of this paper are: nucl-ex
14
The categories of this paper are: math-ph
23
The categories of this paper are: solv-int
17
The categories of this paper are: q-fin
31
The categories of this paper are: ao-sci
35
The categories of this paper are: mtrl-th
22
The categories of this paper are: chao-dyn
37
The categories of this paper are: supr-con
9
The categories of this paper are: nlin
30
The categories of this paper are: q-alg
33
The categories of this paper are: plasm-ph
27
The categories of this paper are: comp-gas
18
The categories of this paper are: econ
11
The categories of this paper are: hep-lat