Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Quantum electrodynamical formulation of photochemical acid generation
  and its implications on optical lithography   The photochemical acid generation is refined from the very first principles
of elementary particle physics. We first briefly review the formulation of the
quantum theory of light based on the quantum electrodynamics framework to
establish the probability for acid generation at a given spacetime point. The
quantum mechanical acid generation is then combined with the deprotection
mechanism to obtain the probabilistic description of the deprotection density,
directly related to the feature formation in a photoresist. A statistical
analysis of the random deprotection density is presented to reveal the leading
characteristics of stochastic feature formation.

21
The categories of this paper are: adap-org
18
The categories of this paper are: econ
30
The categories of this paper are: q-alg
27
The categories of this paper are: comp-gas
31
The categories of this paper are: ao-sci
26
The categories of this paper are: bayes-an
11
The categories of this paper are: hep-lat
19
The categories of this paper are: eess
35
The categories of this paper are: mtrl-th
37
The categories of this paper are: supr-con
7
The categories of this paper are: hep-th
32
The categories of this paper are: atom-ph
16
The categories of this paper are: stat
36
The categories of this paper are: cmp-lg
13
The categories of this paper are: quant-ph
22
The categories of this paper are: chao-dyn