Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Superconducting nanowire single-photon detectors fabricated from
  atomic-layer-deposited NbN   High-quality ultra-thin films of niobium nitride (NbN) are developed by
plasma-enhanced atomic layer deposition (PEALD) technique. Superconducting
nanowire single-photon detectors (SNSPDs) patterned from this material exhibit
high switching currents and saturated internal efficiencies over a broad bias
range at 1550 nm telecommunication wavelength. Statistical analyses on hundreds
of fabricated devices show near-unity throughput yield due to exceptional
homogeneity of the films. The ALD-NbN material represents an ideal
superconducting material for fabricating large single-photon detector arrays
combining high efficiency, low jitter, low dark counts.

30
The categories of this paper are: q-alg
14
The categories of this paper are: math-ph
24
The categories of this paper are: dg-ga
35
The categories of this paper are: mtrl-th
19
The categories of this paper are: eess
26
The categories of this paper are: bayes-an
32
The categories of this paper are: atom-ph
10
The categories of this paper are: q-bio
37
The categories of this paper are: supr-con
29
The categories of this paper are: funct-an
27
The categories of this paper are: comp-gas
2
The categories of this paper are: math
33
The categories of this paper are: plasm-ph
15
The categories of this paper are: nucl-ex
1
The categories of this paper are: cs
25
The categories of this paper are: patt-sol