Instruct: Identify the main and secondary category of Arxiv papers based on the titles
Query: Interface Trap Density Metrology of state-of-the-art undoped Si
  n-FinFETs
28
The categories of this paper are: alg-geom
15
The categories of this paper are: nucl-ex
30
The categories of this paper are: q-alg
1
The categories of this paper are: cs
6
The categories of this paper are: astro-ph
36
The categories of this paper are: cmp-lg
37
The categories of this paper are: supr-con
34
The categories of this paper are: chem-ph
0
The categories of this paper are: hep-ph
18
The categories of this paper are: econ
2
The categories of this paper are: math
8
The categories of this paper are: hep-ex
27
The categories of this paper are: comp-gas
5
The categories of this paper are: gr-qc
9
The categories of this paper are: nlin
22
The categories of this paper are: chao-dyn