Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Photonic Damascene Process for Integrated High-Q Microresonator Based
  Nonlinear Photonics   High confinement, integrated silicon nitride (SiN) waveguides have recently
emerged as attractive platform for on-chip nonlinear optical devices. The
fabrication of high-Q SiN microresonators with anomalous group velocity
dispersion (GVD) has enabled broadband nonlinear optical frequency comb
generation. Such frequency combs have been successfully applied in coherent
communication and ultrashort pulse generation. However, the reliable
fabrication of high confinement waveguides from stoichiometric, high stress SiN
remains challenging. Here we present a novel photonic Damascene fabrication
process enabling the use of substrate topography for stress control and thin
film crack prevention. With close to unity sample yield we fabricate
microresonators with $1.35\,\mu\mathrm{m}$ thick waveguides and optical Q
factors of $3.7\times10^{6}$ and demonstrate single temporal dissipative Kerr
soliton (DKS) based coherent optical frequency comb generation. Our newly
developed process is interesting also for other material platforms, photonic
integration and mid infrared Kerr comb generation.

13
The categories of this paper are: quant-ph
8
The categories of this paper are: hep-ex
10
The categories of this paper are: q-bio
4
The categories of this paper are: cond-mat
1
The categories of this paper are: cs
31
The categories of this paper are: ao-sci
28
The categories of this paper are: alg-geom
21
The categories of this paper are: adap-org
7
The categories of this paper are: hep-th
30
The categories of this paper are: q-alg
33
The categories of this paper are: plasm-ph
34
The categories of this paper are: chem-ph
19
The categories of this paper are: eess
15
The categories of this paper are: nucl-ex
36
The categories of this paper are: cmp-lg
12
The categories of this paper are: nucl-th