Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Vibration Combined High Temperature Cycle Tests for Capacitive MEMS
  Accelerometers   In this paper vibration combined high temperature cycle tests for packaged
capacitive SOI-MEMS accelerometers are presented. The aim of these tests is to
provide useful Design for Reliability information for MEMS designers. A high
temperature test chamber and a chopper-stabilized read-out circuitry were
designed and realized at BME - DED. Twenty thermal cycles of combined
Temperature Cycle Test and Fatigue Vibration Test has been carried out on 5
samples. Statistical evaluation of the test results showed that degradation has
started in 3 out of the 5 samples.

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The categories of this paper are: astro-ph
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The categories of this paper are: alg-geom
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The categories of this paper are: dg-ga
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The categories of this paper are: nucl-ex
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The categories of this paper are: eess
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The categories of this paper are: solv-int
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The categories of this paper are: math
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The categories of this paper are: bayes-an
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The categories of this paper are: comp-gas
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The categories of this paper are: econ
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The categories of this paper are: q-bio
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The categories of this paper are: adap-org
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The categories of this paper are: gr-qc
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The categories of this paper are: funct-an
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The categories of this paper are: hep-ex
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The categories of this paper are: mtrl-th