Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Observation of extreme-ultraviolet light emission from an expanding
  plasma jet with multiply-charged argon or xenon ions   We report the first direct demonstration of possibility to generate the
extreme ultraviolet (EUV) radiation with a freely expanding jet of dense plasma
with multiply-charged ions supported by high-power microwaves. The detected
emission power is about 20 W at 18--50 nm for argon and xenon and 0.3 W at
13--17 nm for xenon. The discharge with a peak electron density up to $3\times
10^{16}\,$cm$^{-3}$ and a characteristic size of $150\,\mu$m is supported by a
focused radiation of a recently developed gyrotron with unique characteristics,
250~kW output power at 250~GHz, operating in a relatively long (50$\,\mu$s)
pulse mode. Up-scaling of these experimental results gives grounds for
development of a point-like kilowatt-level EUV source for a high-resolution
lithography able to fulfill requirements of the microelectronics industry.

14
The categories of this paper are: math-ph
29
The categories of this paper are: funct-an
18
The categories of this paper are: econ
5
The categories of this paper are: gr-qc
31
The categories of this paper are: ao-sci
1
The categories of this paper are: cs
22
The categories of this paper are: chao-dyn
35
The categories of this paper are: mtrl-th
15
The categories of this paper are: nucl-ex
12
The categories of this paper are: nucl-th
20
The categories of this paper are: acc-phys
2
The categories of this paper are: math
4
The categories of this paper are: cond-mat
33
The categories of this paper are: plasm-ph
28
The categories of this paper are: alg-geom
13
The categories of this paper are: quant-ph