Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Impact of Stoichiometric Silicon Nitride Growth Conditions on Dispersion
  Engineering of Broadband Microresonator Frequency Combs   Microresonator frequency combs, or microcombs, have gained wide appeal for
their rich nonlinear physics and wide range of applications. Stoichiometric
silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD),
in particular, are widely used in chip-integrated Kerr microcombs. Critical to
such devices is the ability to control the microresonator dispersion, which has
contributions from both material refractive index dispersion and geometric
confinement. Here, we show that modifications to the LPCVD growth conditions,
specifically the ratio of the gaseous precursors, has a significant impact on
material dispersion and hence the overall microresonator dispersion. In
contrast to the many efforts focused on comparison between Si-rich films and
stoichiometric (Si$_3$N$_4$) films, here we entirely focus on films that are
within the nominally stoichiometric growth regime. We further show that
microresonator geometric dispersion can be tuned to compensate for changes in
the material dispersion.

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The categories of this paper are: solv-int
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The categories of this paper are: dg-ga
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The categories of this paper are: q-fin
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The categories of this paper are: nlin
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The categories of this paper are: chem-ph
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The categories of this paper are: plasm-ph
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The categories of this paper are: ao-sci
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The categories of this paper are: hep-ph
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The categories of this paper are: acc-phys
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The categories of this paper are: supr-con
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The categories of this paper are: econ
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The categories of this paper are: bayes-an
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The categories of this paper are: chao-dyn
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The categories of this paper are: astro-ph
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The categories of this paper are: mtrl-th
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The categories of this paper are: gr-qc