Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: In situ monitoring of atomic layer epitaxy via optical ellipsometry   We report on the use of time-resolved optical ellipsometry to monitor the
deposition of single atomic layers with subatomic sensitivity.
Ruddlesden-Popper thin films of SrO(SrTiO3)n=4 were grown by means of
metalorganic aerosol deposition in the atomic layer epitaxy mode on
SrTiO3(100), LSAT(100) and DyScO3(110) substrates. The measured time
dependences of ellipsometric angles, ${\Delta}(t)$ and ${\Psi}(t)$, were
described by using a simple optical model, considering the sequence of atomic
layers SrO and TiO2 with corresponding bulk refractive indices. As a result,
valuable online information on the growth process, the film structure and
defects were obtained. Ex situ characterization techniques, i.e. transmission
electron microscopy (TEM), X-ray diffraction (XRD) and X- ray reflectometry
(XRR) verify the crystal structure and confirm the predictions of optical
ellipsometry.

26
The categories of this paper are: bayes-an
37
The categories of this paper are: supr-con
21
The categories of this paper are: adap-org
33
The categories of this paper are: plasm-ph
23
The categories of this paper are: solv-int
30
The categories of this paper are: q-alg
28
The categories of this paper are: alg-geom
3
The categories of this paper are: physics
22
The categories of this paper are: chao-dyn
2
The categories of this paper are: math
15
The categories of this paper are: nucl-ex
19
The categories of this paper are: eess
11
The categories of this paper are: hep-lat
36
The categories of this paper are: cmp-lg
14
The categories of this paper are: math-ph
16
The categories of this paper are: stat