Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Effects of electron beam induced carbon deposition on the mechanical
  properties of a micromechanical oscillator   Electron beam induced deposition of amorphous carbon finds several uses in
microlithography, surface micromachining, and the manufacturing of micro- and
nanomechanical devices. This process also occurs unintentionally in vacuum
chambers of electron microscopes and interferes with normal image acquisition
by reducing resolution and causing charging effects. In this work, we show that
the resonance frequency of a micromechanical oscillator can be significantly
affected by exposing it to a focused electron beam, which induces local
carbonization on the surface of the oscillator, resulting in increase in the
effective stress along the beam. This \emph{in-situ} carbonization can be
utilized for analyzing the amount of residual organic contamination in vacuum
chambers. In addition, the method described here allows post-fabrication fine
tuning of mechanical resonance frequencies of individual oscillating elements.

31
The categories of this paper are: ao-sci
35
The categories of this paper are: mtrl-th
36
The categories of this paper are: cmp-lg
30
The categories of this paper are: q-alg
3
The categories of this paper are: physics
6
The categories of this paper are: astro-ph
25
The categories of this paper are: patt-sol
28
The categories of this paper are: alg-geom
21
The categories of this paper are: adap-org
10
The categories of this paper are: q-bio
0
The categories of this paper are: hep-ph
34
The categories of this paper are: chem-ph
19
The categories of this paper are: eess
13
The categories of this paper are: quant-ph
8
The categories of this paper are: hep-ex
1
The categories of this paper are: cs