Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Induced Optical Losses in Optoelectronic Devices due to Focused Ion Beam
  Damages   A study of damages caused by gallium focused ion beam (FIB) into III-V
compounds is presented. Potential damages caused by local heating, ion
implantation, and selective sputtering are presented. Preliminary analysis
shows that local heating is negligible. Gallium implantation is shown to occur
over areas tens of nanometers thick. Gallium accumulation as well as selective
sputtering during III-V compounds milling is expected. Particularly, for GaAs,
this effect leads to gallium segregation and formation of metallic clusters.
Microdisk resonators were fabricated using FIB milling with different emission
currents to analyze these effects on a device. It is shown that for higher
emission current, thus higher implantation doses, the cavity quality factor
rapidly decreases due to optical scattering losses induced by implanted gallium
atoms.

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The categories of this paper are: astro-ph
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The categories of this paper are: q-fin
35
The categories of this paper are: mtrl-th
27
The categories of this paper are: comp-gas
12
The categories of this paper are: nucl-th
10
The categories of this paper are: q-bio
9
The categories of this paper are: nlin
34
The categories of this paper are: chem-ph
8
The categories of this paper are: hep-ex
32
The categories of this paper are: atom-ph
37
The categories of this paper are: supr-con
14
The categories of this paper are: math-ph
1
The categories of this paper are: cs
21
The categories of this paper are: adap-org
11
The categories of this paper are: hep-lat
29
The categories of this paper are: funct-an