Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Measurement of phosphorus segregation in silicon at the atomic-scale
  using STM   In order to fabricate precise atomic-scale devices in silicon using a
combination of scanning tunnelling microscopy (STM) and molecular beam epitaxy
it is necessary to minimize the segregation/diffusion of dopant atoms during
silicon encapsulation. We characterize the surface segregation/diffusion of
phosphorus atoms from a $\delta$-doped layer in silicon after encapsulation at
250$^{\circ}$C and room temperature using secondary ion mass spectrometry
(SIMS), Auger electron spectroscopy (AES), and STM. We show that the surface
phosphorus density can be reduced to a few percent of the initial
$\delta$-doped density if the phosphorus atoms are encapsulated with 5 or 10
monolayers of epitaxial silicon at room temperature. We highlight the
limitations of SIMS and AES to determine phosphorus segregation at the
atomic-scale and the advantage of using STM directly.

37
The categories of this paper are: supr-con
18
The categories of this paper are: econ
13
The categories of this paper are: quant-ph
29
The categories of this paper are: funct-an
9
The categories of this paper are: nlin
16
The categories of this paper are: stat
0
The categories of this paper are: hep-ph
21
The categories of this paper are: adap-org
20
The categories of this paper are: acc-phys
32
The categories of this paper are: atom-ph
35
The categories of this paper are: mtrl-th
3
The categories of this paper are: physics
27
The categories of this paper are: comp-gas
26
The categories of this paper are: bayes-an
10
The categories of this paper are: q-bio
8
The categories of this paper are: hep-ex