Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Electrical activation and electron spin coherence of ultra low dose
  antimony implants in silicon   We implanted ultra low doses (2x10^11 cm-2) of 121Sb ions into isotopically
enriched 28Si and find high degrees of electrical activation and low levels of
dopant diffusion after rapid thermal annealing. Pulsed Electron Spin Resonance
shows that spin echo decay is sensitive to the dopant depths, and the interface
quality. At 5.2 K, a spin decoherence time, T2, of 0.3 ms is found for profiles
peaking 50 nm below a Si/SiO2 interface, increasing to 0.75 ms when the surface
is passivated with hydrogen. These measurements provide benchmark data for the
development of devices in which quantum information is encoded in donor
electron spins.

12
The categories of this paper are: nucl-th
29
The categories of this paper are: funct-an
14
The categories of this paper are: math-ph
7
The categories of this paper are: hep-th
10
The categories of this paper are: q-bio
28
The categories of this paper are: alg-geom
5
The categories of this paper are: gr-qc
25
The categories of this paper are: patt-sol
1
The categories of this paper are: cs
13
The categories of this paper are: quant-ph
0
The categories of this paper are: hep-ph
2
The categories of this paper are: math
22
The categories of this paper are: chao-dyn
6
The categories of this paper are: astro-ph
11
The categories of this paper are: hep-lat
16
The categories of this paper are: stat