Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Simulation of boron diffusion during low-temperature annealing of
  implanted silicon   Modeling of ion-implanted boron redistribution in silicon crystals during
low-temperature annealing with a small thermal budget has been carried out. It
was shown that formation of "tails"' in the low-concentration region of
impurity profiles occurs due to the long-range migration of boron interstitials

20
The categories of this paper are: acc-phys
9
The categories of this paper are: nlin
6
The categories of this paper are: astro-ph
17
The categories of this paper are: q-fin
24
The categories of this paper are: dg-ga
3
The categories of this paper are: physics
11
The categories of this paper are: hep-lat
33
The categories of this paper are: plasm-ph
16
The categories of this paper are: stat
37
The categories of this paper are: supr-con
1
The categories of this paper are: cs
23
The categories of this paper are: solv-int
22
The categories of this paper are: chao-dyn
15
The categories of this paper are: nucl-ex
13
The categories of this paper are: quant-ph
19
The categories of this paper are: eess