Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Development of Yttrium alloy ion source and its application in
  nanofabrication   We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS), generating
focused ion beams of yttrium ions, and its prospective applications for
nanofabrication, sample preparation, lithographic and implantation processes.
Working parameters of the AuSiY LMAIS are similar to other gold-silicon based
LMAIS. We found anomalously high emission current of triple charged Yttrium
ions. Influence of Yttrium implantation on optical qualities of the implanted
ion-ensembles is shown in luminescence of co-implanted Erbium ions.

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The categories of this paper are: cs
34
The categories of this paper are: chem-ph
18
The categories of this paper are: econ
31
The categories of this paper are: ao-sci
6
The categories of this paper are: astro-ph
20
The categories of this paper are: acc-phys
26
The categories of this paper are: bayes-an
0
The categories of this paper are: hep-ph
13
The categories of this paper are: quant-ph
24
The categories of this paper are: dg-ga
36
The categories of this paper are: cmp-lg
33
The categories of this paper are: plasm-ph
19
The categories of this paper are: eess
4
The categories of this paper are: cond-mat
35
The categories of this paper are: mtrl-th
15
The categories of this paper are: nucl-ex