Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Micro-tensile tests on micromachined metal on polymer specimens:
  elasticity, plasticity and rupture   This study is focused on the mechanical characterization of materials used in
microelectronic and micro- electromechanical systems (MEMS) devices. In order
to determine their mechanical parameters, a new deformation bench test with
suitable micromachined specimens have been developed. Uniaxial tensile tests
were performed on "low cost" specimens, consisting in electroplated thin copper
films and structures, deposited on a polimide type substrate. Moreover, a
cyclic mechanical actuation via piezoelectric actuators was tested on the same
deformation bench. These experiments validate the device for performing dynamic
characterization of materials, and reliability studies of different
microstructures.

35
The categories of this paper are: mtrl-th
15
The categories of this paper are: nucl-ex
26
The categories of this paper are: bayes-an
37
The categories of this paper are: supr-con
33
The categories of this paper are: plasm-ph
13
The categories of this paper are: quant-ph
34
The categories of this paper are: chem-ph
32
The categories of this paper are: atom-ph
5
The categories of this paper are: gr-qc
22
The categories of this paper are: chao-dyn
2
The categories of this paper are: math
8
The categories of this paper are: hep-ex
6
The categories of this paper are: astro-ph
24
The categories of this paper are: dg-ga
23
The categories of this paper are: solv-int
28
The categories of this paper are: alg-geom