Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: InAs Nanowire MOS Capacitors   We present a capacitance-voltage study for arrays of vertical InAs nanowires.
MOS capacitors are obtained by insulating the nanowires with a conformal 10nm
HfO2 layer and using a top Cr/Au metallization as one of the capacitor's
electrodes. The described fabrication and characterization technique enables a
systematic investigation of the carrier density in the nanowires as well as of
the quality of the MOS interface.

27
The categories of this paper are: comp-gas
1
The categories of this paper are: cs
24
The categories of this paper are: dg-ga
31
The categories of this paper are: ao-sci
6
The categories of this paper are: astro-ph
16
The categories of this paper are: stat
10
The categories of this paper are: q-bio
37
The categories of this paper are: supr-con
28
The categories of this paper are: alg-geom
8
The categories of this paper are: hep-ex
21
The categories of this paper are: adap-org
15
The categories of this paper are: nucl-ex
25
The categories of this paper are: patt-sol
18
The categories of this paper are: econ
13
The categories of this paper are: quant-ph
33
The categories of this paper are: plasm-ph