Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: A microelectromechanically controlled cavity optomechanical sensing
  system   Microelectromechanical systems (MEMS) have been applied to many measurement
problems in physics, chemistry, biology and medicine. In parallel, cavity
optomechanical systems have achieved quantum-limited displacement sensitivity
and ground state cooling of nanoscale objects. By integrating a novel cavity
optomechanical structure into an actuated MEMS sensing platform, we demonstrate
a system with high quality-factor interferometric readout, electrical tuning of
the optomechanical coupling by two orders of magnitude, and a mechanical
transfer function adjustable via feedback. The platform separates optical and
mechanical components, allowing flexible customization for specific scientific
and commercial applications. We achieve displacement sensitivity of 4.6
fm/Hz^1/2 and force sensitivity of 53 aN/Hz^1/2 with only 250 nW optical power
launched into the sensor. Cold-damping feedback is used to reduce the thermal
mechanical vibration of the sensor by 3 orders of magnitude and to broaden the
sensor bandwidth by approximately the same factor, to above twice the
fundamental frequency of \approx 40 kHz. The readout sensitivity approaching
the standard quantum limit is combined with MEMS actuation in a fully
integrated, compact, low power, stable system compatible with Si batch
fabrication and electronics integration.

36
The categories of this paper are: cmp-lg
4
The categories of this paper are: cond-mat
19
The categories of this paper are: eess
2
The categories of this paper are: math
6
The categories of this paper are: astro-ph
8
The categories of this paper are: hep-ex
24
The categories of this paper are: dg-ga
31
The categories of this paper are: ao-sci
17
The categories of this paper are: q-fin
29
The categories of this paper are: funct-an
35
The categories of this paper are: mtrl-th
26
The categories of this paper are: bayes-an
14
The categories of this paper are: math-ph
37
The categories of this paper are: supr-con
33
The categories of this paper are: plasm-ph
28
The categories of this paper are: alg-geom