Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: New DRIE-Patterned Electrets for Vibration Energy Harvesting   This paper is about a new manufacturing process aimed at developing stable
SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step
for an application in electret-based Vibration Energy Harvesters (e-VEH). This
process consists in forming continuous layers of SiO2/Si3N4 electrets in order
to limit surface conduction phenomena and is a new way to see the problem of
electret patterning. Experimental results prove that patterned electrets
charged by a positive corona discharge show excellent stability with high
surface charge densities that may reach 5mC/m^2 on 1.1\mu m-thick layers, even
with fine patterning and harsh temperature conditions (up to 250{\deg}C). This
paves the way to new e-VEH designs and manufacturing processes.

21
The categories of this paper are: adap-org
11
The categories of this paper are: hep-lat
31
The categories of this paper are: ao-sci
9
The categories of this paper are: nlin
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The categories of this paper are: eess
18
The categories of this paper are: econ
3
The categories of this paper are: physics
27
The categories of this paper are: comp-gas
33
The categories of this paper are: plasm-ph
8
The categories of this paper are: hep-ex
16
The categories of this paper are: stat
5
The categories of this paper are: gr-qc
25
The categories of this paper are: patt-sol
36
The categories of this paper are: cmp-lg
35
The categories of this paper are: mtrl-th
30
The categories of this paper are: q-alg