Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Scalable fabrication of ultrahigh-finesse micromirrors with variable
  geometry   Due to their unrivaled performance and versatility, high-finesse
Fabry-P\'erot resonators have enabled scientific and technological
breakthroughs in fields ranging from cavity QED to optical clocks and precision
metrology. Scalable production of compact Fabry-P\'erot resonators could enable
miniaturaization and integration of these technologies for new applications.
However, it has proven difficult to identify a microfabrication approach that
can yield world-class resonator performance and produce the range of required
resonator geometries. In this paper, we demonstrate a wafer-scale fabrication
technique that produces arrays of ultrahigh-finesse ($\geq 10^6$) mirrors with
a user-defined radius of curvature spanning four orders of magnitude
($10^{-4}-10^0$ m). We employ photoresist reflow and reactive ion etching to
shape and transfer mirror templates into a substrate while maintaining
sub-Angstrom roughness. This substrate is coated and used to create arrays of
compact Fabry-P\'erot resonators with finesse values as high as 1.3 million and
measured excess loss $< 1$ ppm. Optical ringdown measurements of 43 devices
across 5 substrates reveal that the fabricated cavity mirrors with both small
and large radii of curvature produce an average coating-limited finesse of 1.05
million. This versatile new approach opens the door to scalable fabrication of
high-finesse miniaturized Fabry-P\'erot cavities needed for next-generation
quantum optics and frequency metrology technologies.

10
The categories of this paper are: q-bio
21
The categories of this paper are: adap-org
25
The categories of this paper are: patt-sol
37
The categories of this paper are: supr-con
16
The categories of this paper are: stat
2
The categories of this paper are: math
7
The categories of this paper are: hep-th
12
The categories of this paper are: nucl-th
22
The categories of this paper are: chao-dyn
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The categories of this paper are: eess
30
The categories of this paper are: q-alg
29
The categories of this paper are: funct-an
1
The categories of this paper are: cs
20
The categories of this paper are: acc-phys
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The categories of this paper are: econ
26
The categories of this paper are: bayes-an