Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Role of Pressure in the Growth of Hexagonal Boron Nitride Thin Films
  from Ammonia-Borane   We analyze the optical, chemical, and electrical properties of chemical vapor
deposition (CVD) grown hexagonal boron nitride (h-BN) using the precursor
ammonia-borane ($H_3N-BH_3$) as a function of $Ar/H_2$ background pressure
($P_{TOT}$). Films grown at $P_{TOT}$ less than 2.0 Torr are uniform in
thickness, highly crystalline, and consist solely of h-BN. At larger $P_{TOT}$,
with constant precursor flow, the growth rate increases, but the resulting h-BN
is more amorphous, disordered, and $sp^3$ bonded. We attribute these changes in
h-BN grown at high pressure to incomplete thermolysis of the $H_3N-BH_3$
precursor from a passivated Cu catalyst. A similar increase in h-BN growth rate
and amorphization is observed even at low $P_{TOT}$ if the $H_3N-BH_3$ partial
pressure is initially greater than the background pressure $P_{TOT}$ at the
beginning of growth. h-BN growth using the $H_3N-BH_3$ precursor reproducibly
can give large-area, crystalline h-BN thin films, provided that the total
pressure is under 2.0 Torr and the precursor flux is well-controlled.

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The categories of this paper are: math-ph
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The categories of this paper are: astro-ph
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The categories of this paper are: chem-ph
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The categories of this paper are: chao-dyn
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The categories of this paper are: nlin
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The categories of this paper are: dg-ga
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The categories of this paper are: cs
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The categories of this paper are: gr-qc
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The categories of this paper are: hep-th
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The categories of this paper are: nucl-ex
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The categories of this paper are: econ
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The categories of this paper are: q-bio
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The categories of this paper are: supr-con
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The categories of this paper are: hep-ph
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The categories of this paper are: hep-ex
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The categories of this paper are: stat