Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Experimental Characterization of the static behaviour of
  microcatntilevers electrostatically actuated   This paper concerns the experimental validation of some mathematical models
previously developed by the authors, to predict the static behaviour of
microelectrostatic actuators, basically free-clamped microbeams. This layout is
currently used in RF-MEMS design operation or even in material testing at
microscale. The analysis investigates preliminarily the static behaviour of a
set of microcantilevers bending in-plane. This investigation is aimed to
distinguish the geometrical linear behaviour, exhibited under small
displacement assumption, from the geometrical nonlinearity, caused by large
deflection. The applied electromechanical force, which nonlinearly depends on
displacement, charge and voltage, is predicted by a coupled-field approach,
based on numerical methods and herewith experimentally validated, by means of a
Fogale Zoomsurf 3D. Model performance is evaluated on pull-in prediction and on
the curve displacement vs. voltage. In fact, FEM nonlinear solution performed
by a coupled-field approach, available on commercial codes, and by a FEM
non-incremental approach are compared with linear solution, for different
values of the design parameters.

25
The categories of this paper are: patt-sol
10
The categories of this paper are: q-bio
37
The categories of this paper are: supr-con
16
The categories of this paper are: stat
19
The categories of this paper are: eess
18
The categories of this paper are: econ
26
The categories of this paper are: bayes-an
30
The categories of this paper are: q-alg
2
The categories of this paper are: math
15
The categories of this paper are: nucl-ex
14
The categories of this paper are: math-ph
32
The categories of this paper are: atom-ph
13
The categories of this paper are: quant-ph
22
The categories of this paper are: chao-dyn
31
The categories of this paper are: ao-sci
20
The categories of this paper are: acc-phys