Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Influence of the thickness of Si and Ge films deposited on
  Si$_3$N$_4$/SiO$_2$/Si substrates on their structure and diffusion of
  hydrogen atoms from Si$_3$N$_4$ layers
20
The categories of this paper are: acc-phys
35
The categories of this paper are: mtrl-th
13
The categories of this paper are: quant-ph
33
The categories of this paper are: plasm-ph
18
The categories of this paper are: econ
36
The categories of this paper are: cmp-lg
29
The categories of this paper are: funct-an
17
The categories of this paper are: q-fin
23
The categories of this paper are: solv-int
11
The categories of this paper are: hep-lat
34
The categories of this paper are: chem-ph
32
The categories of this paper are: atom-ph
28
The categories of this paper are: alg-geom
12
The categories of this paper are: nucl-th
19
The categories of this paper are: eess
27
The categories of this paper are: comp-gas