Instruct: Identify the main and secondary category of Arxiv papers based on the titles and abstracts
Query: Self-sealing complex oxide resonators   Although 2D materials hold great potential for next-generation pressure
sensors, recent studies revealed that gases permeate along the membrane-surface
interface that is only weakly bound by van der Waals interactions,
necessitating additional sealing procedures. In this work, we demonstrate the
use of free-standing complex oxides as self-sealing membranes that allow the
reference cavity of pressure sensors to be sealed by a simple anneal. To test
the hermeticity, we study the gas permeation time constants in nano-mechanical
resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si
cavities which show an improvement up to 4 orders of magnitude in the
permeation time constant after annealing the devices for 15 minutes. Similar
devices fabricated on Si3N4/Si do not show such improvements, suggesting that
the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at
the SiO2/complex oxide interface during the self-sealing anneal. We confirm the
enhancement of adhesion by picosecond ultrasonics measurements which show an
increase in the interfacial stiffness by 70% after annealing. Since it is
straigthforward to apply, the presented self-sealing method is thus a promising
route toward realizing ultrathin hermetic pressure sensors.

6
The categories of this paper are: astro-ph
13
The categories of this paper are: quant-ph
25
The categories of this paper are: patt-sol
7
The categories of this paper are: hep-th
29
The categories of this paper are: funct-an
18
The categories of this paper are: econ
22
The categories of this paper are: chao-dyn
19
The categories of this paper are: eess
35
The categories of this paper are: mtrl-th
32
The categories of this paper are: atom-ph
17
The categories of this paper are: q-fin
30
The categories of this paper are: q-alg
24
The categories of this paper are: dg-ga
10
The categories of this paper are: q-bio
21
The categories of this paper are: adap-org
34
The categories of this paper are: chem-ph